Pulsed Laser Annealing of Phosphorous-Implanted 4H-SiC: Electrical and Structural Characteristics
Crystallization of amorphous Si films by pulsed laser annealing and their structural characteristics
2004 ◽
Vol 19
(6)
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pp. 759-763
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Keyword(s):
2001 ◽
Vol 328
(1-2)
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pp. 242-247
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1982 ◽
Vol 41
(4)
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pp. 321-324
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Keyword(s):
Keyword(s):