An ultra-high pressure sensor based on SOI piezoresistive material
2010 ◽
Vol 24
(8)
◽
pp. 1655-1660
◽
Keyword(s):
2019 ◽
Vol 37
(11)
◽
pp. 2719-2725
◽
Keyword(s):
2013 ◽
Vol 27
(8)
◽
pp. 2383-2389
◽
2010 ◽
Vol 39
(12)
◽
pp. 1898-1902
◽
Keyword(s):
2007 ◽