Chemo-mechanical manufacturing of fused silica by combining ultrasonic vibration with fixed-abrasive pellets

2012 ◽  
Vol 13 (12) ◽  
pp. 2163-2172 ◽  
Author(s):  
Yaguo Li ◽  
Yongbo Wu ◽  
Libo Zhou ◽  
Masakazu Fujimoto ◽  
Jian Wang ◽  
...  
Author(s):  
Yaguo Li ◽  
Yongbo Wu ◽  
Libo Zhou ◽  
Masakazu Fujimoto ◽  
Jian Wang ◽  
...  

2012 ◽  
Vol 523-524 ◽  
pp. 155-160 ◽  
Author(s):  
Ya Guo Li ◽  
Yong Bo Wu ◽  
Li Bo Zhou ◽  
Hui Ru Guo ◽  
Jian Guo Cao ◽  
...  

Ultrasonic vibration assisted processing is well known for the improvement in machined surface quality and processing efficiency due to the reduced forces and tribology-generated heating when grinding hard-brittle materials. We transplanted this philosophy to chemo-mechanical fixed abrasive polishing of optical glass, namely fused silica, in an attempt to improve surface roughness and/or material removal rate. Experiments were conducted to elucidate the fundamental characteristics of chemo-mechanical fixed abrasive polishing of fused silica in the presence and absence of ultrasonic vibration on a setup with an in-house built gadget. The experimental results show that ultrasonic vibration assisted chemo-mechanical fixed abrasive polishing can yield increased material removal rate while maintaining the surface roughness of manufactured optics compared to conventional fixed abrasive polishing without ultrasonic vibration. The mechanism of material removal in fixed abrasive polishing was also delved. We found that the glass material is removed through the synergic effects of chemical and mechanical actions between abrasives and glass and the resultant grinding swarf contains ample Si element as well as Ce element, standing in stark contrast to the polisher that contains abundant Ce element and minor Si element.


2014 ◽  
Vol 53 (26) ◽  
pp. 5841 ◽  
Author(s):  
Zhichao Dong ◽  
Haobo Cheng ◽  
Xu Ye ◽  
Hon-Yuen Tam

2010 ◽  
Vol 126-128 ◽  
pp. 282-288
Author(s):  
Zhen Zhong Wang ◽  
Yong Bo Wu ◽  
Li Bo Zhou ◽  
Yin Biao Guo ◽  
Chen Xu Wu

As a new fixed-abrasive machining method, chemo-mechanical grinding (CMG) is developed from chemical mechanical polishing (CMP), with the obvious advantage of geometric accuracy determinacy and no slurry. To improve material removal rate and enhance the popularity of CMG, this paper introduces a combined grinding method, i.e., two dimensional ultrasonic vibration assisted CMG (2D-UACMG). Si wafer is taken as the workpiece and the influence of ultrasonic vibration modes and process parameters on the surface roughness and the material removal is examined. The results show 2D-UACMG can obtain better surface quality with little surface damage at nanometer level compared with the conventional CMG without the ultrasonic vibration.


2017 ◽  
Vol 5 (2) ◽  
Author(s):  
Feng Jiao ◽  
Bo Zhao

Lapping is a key processing step for precision parts, which directly affects machining quality, precision, and efficiency. Due to some drawbacks of free-abrasive lapping such as deep scratches on the lapped surface, lower lapping efficiency for lower lapping speed, severe waste of abrasive, high-processing cost, and so on, conventional fixed-abrasive lapping (CFL) technology was proposed and developed recently. Meanwhile, considering the unique advantages of the ultrasonic-assisted machining during the processing of those hard and brittle materials and the effect of ultrasonic vibration on the self-sharpening characteristic of abrasive pellet, a novel ultrasonic-assisted fixed-abrasive lapping (UAFL) technology is put forward and corresponding lapping device for engineering ceramics cylindrical part is developed in this paper. Meanwhile, UAFL mechanism and characteristics were studied theoretically and experimentally. Research results show that superimposed ultrasonic vibration changes the lapping movement characteristics and material removal mechanism to a certain extent, helping to heighten material removal rate, smoothen the waveform of tangential force, reduce the average tangential force, and improve surface machining quality. UAFL can be regarded as a high efficiency and precision processing technology for engineering ceramics cylindrical part.


Author(s):  
Feng Jiao ◽  
Bo Zhao

As the final machining procedure of precision components, lapping is often regarded as an important step affecting surface quality, machining accuracy and machining efficiency. Due to some drawbacks of free-abrasive lapping such as deep scratches on the lapped surface, lower lapping efficiency for lower lapping speed, severe waste of abrasive, high processing cost, and so on, fixed-abrasive lapping technology was put forward and developed recently. Meanwhile, considering the unique advantages of the ultrasonic vibration aided machining in the processing of hard-brittle materials such as engineering ceramics, optical glass, etc. and the influence of ultrasonic vibration on the self-sharpening characteristic of abrasive pellet, a novel ultrasonic aided fixed-abrasive lapping technology for engineering ceramics cylindrical part is put forward and corresponding lapping device is developed in this paper. Through theoretical analysis on the ultrasonic aided lapping mechanism, it is found that the value and direction of grain movement speed will change due to the superimposition of ultrasonic vibration, which will lead to the change of cutting angles and further affect the lapping performance. Assuming every abrasive particle is a cutting insert, under the assistance of axial ultrasonic vibration, negative rake of the grain will increase, even change to positive value, so as to sharpen the lapping grains and benefit the lapping processing. Moreover, when ultrasonic vibration is superimposed to the lapping tool, motion locus of abrasive grains will present sinusoid. As a result, the locus of single grain may self-interfere in actual lapping process and make blank cutting. So the depth of cut of abrasive grain will increase under the same lapping pressure, leading to the increase of MRR under the same lapping conditions. Finally, a series of contrast lapping experiments were carried out and some lapping characteristics were researched. Experimental results show that ultrasonic vibration assistance can help to heighten material removal rate, smoothen the waveform of tangential force, reduce the average tangential force and improve surface quality. Ultrasonic aided lapping with fixed abrasive is a high efficiency and precision processing technology for engineering ceramics cylindrical part.


Sign in / Sign up

Export Citation Format

Share Document