Comparison Between Three Tuning Methods of PID Control for High Precision Positioning Stage

MAPAN ◽

10.1007/s12647-014-0123-z ◽

2014 ◽

Vol 30 (1) ◽

pp. 65-70 ◽

Author(s):

Rajat Sen ◽

Chinmoy Pati ◽

Samik Dutta ◽

Ranjan Sen

Keyword(s):

High Precision ◽

Pid Control ◽

Precision Positioning ◽

Positioning Stage ◽

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High-precision positioning stage using optical zooming laser interferometer for linear encoder calibration

International Journal of Precision Engineering and Manufacturing ◽

10.1007/s12541-010-0080-6 ◽

2010 ◽

Vol 11 (5) ◽

pp. 681-687 ◽

Author(s):

Mariko Kajima ◽

Kaoru Minoshima

Keyword(s):

High Precision ◽

Laser Interferometer ◽

Precision Positioning ◽

Positioning Stage ◽

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High-precision positioning stage for microassembly purposes

10.1117/12.341267 ◽

1999 ◽

Author(s):

Manfred Weck ◽

Bernd Petersen

Keyword(s):

High Precision ◽

Precision Positioning ◽

Positioning Stage

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Modeling and Control of Macro-micro Dual-Drive High Acceleration and High Precision Positioning Stage Using for IC Packaging

Intelligent Robotics and Applications - Lecture Notes in Computer Science ◽

10.1007/978-3-540-88518-4_30 ◽

2008 ◽

pp. 269-278 ◽

Author(s):

Yanjie Liu ◽

Teng Li ◽

Lining Sun

Keyword(s):

High Precision ◽

Precision Positioning ◽

Modeling And Control ◽

High Acceleration ◽

Ic Packaging ◽

Positioning Stage ◽

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Control of a high precision positioning stage

2012 7th IEEE Conference on Industrial Electronics and Applications (ICIEA) ◽

10.1109/iciea.2012.6360857 ◽

2012 ◽

Author(s):

Jing-Chung Shen ◽

Wen-Yue Jywe ◽

Qun-Zhong Lu ◽

Chia-Hung Wu

Keyword(s):

High Precision ◽

Precision Positioning ◽

Positioning Stage

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Nonlinear control of a novel active magnetic bearings technology based high-precision positioning stage

21st Mediterranean Conference on Control and Automation ◽

10.1109/med.2013.6608914 ◽

2013 ◽

Author(s):

Sergei Basovich ◽

Shai Arogeti ◽

Ziv Brand ◽

Nisim Levi

Keyword(s):

Nonlinear Control ◽

High Precision ◽

Magnetic Bearings ◽

Active Magnetic Bearings ◽

Precision Positioning ◽

Positioning Stage

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A novel friction-actuated 2-DOF high precision positioning stage with hybrid decoupling structure

Mechanism and Machine Theory ◽

10.1016/j.mechmachtheory.2021.104511 ◽

2022 ◽

Vol 167 ◽

pp. 104511

Author(s):

Yanling Tian ◽

Zhichen Huo ◽

Fujun Wang ◽

Cunman Liang ◽

Beichao Shi ◽

...

Keyword(s):

High Precision ◽

Precision Positioning ◽

Positioning Stage

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Multirate Feedforward Control based on Modal Form with Mode Selection Applied to Multi-Modal High-Precision Positioning Stage

2021 IEEE International Conference on Mechatronics (ICM) ◽

10.1109/icm46511.2021.9385685 ◽

2021 ◽

Author(s):

Masahiro Mae ◽

Wataru Ohnishi ◽

Hiroshi Fujimoto

Keyword(s):

High Precision ◽

Feedforward Control ◽

Mode Selection ◽

Precision Positioning ◽

Positioning Stage

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Towards design optimisation of a lifting platform for a piezoworm-driven high precision positioning stage

International Journal of Mechanisms and Robotic Systems ◽

10.1504/ijmrs.2013.057308 ◽

2013 ◽

Vol 1 (4) ◽

pp. 301 ◽

Author(s):

Tarek Mohammad ◽

Shaun Salisbury

Keyword(s):

High Precision ◽

Precision Positioning ◽

Design Optimisation ◽

Positioning Stage

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Robust Control of a High-precision Positioning Stage Using an Integrated H∞ and QFT Controller

Journal of Intelligent Material Systems and Structures ◽

10.1177/1045389x10390251 ◽

2010 ◽

Vol 22 (5) ◽

pp. 421-433 ◽

Author(s):

Meng-Shiun Tsai ◽

Sheng-Hong You ◽

Jie-Ting Jeng

Keyword(s):

Robust Control ◽

High Precision ◽

Precision Positioning ◽

Positioning Stage

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Design of a control system for a macro-micro dual-drive high acceleration high precision positioning stage for IC packaging

Science in China Series E ◽

10.1007/s11431-009-0209-y ◽

2009 ◽

Vol 52 (7) ◽

pp. 1858-1865 ◽

Author(s):

YanJie Liu ◽

Teng Li ◽

LiNing Sun

Keyword(s):

Control System ◽

High Precision ◽

Precision Positioning ◽

High Acceleration ◽

Ic Packaging ◽

Positioning Stage

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