Multirate Feedforward Control based on Modal Form with Mode Selection Applied to Multi-Modal High-Precision Positioning Stage

2021 ◽  
Author(s):  
Masahiro Mae ◽  
Wataru Ohnishi ◽  
Hiroshi Fujimoto
Keyword(s):  
High Precision ◽  
Feedforward Control ◽  
Mode Selection ◽  
Precision Positioning ◽  
Positioning Stage

Comparison Between Three Tuning Methods of PID Control for High Precision Positioning Stage

MAPAN ◽  
2014 ◽  
Vol 30 (1) ◽  
pp. 65-70 ◽  
Author(s):  
Rajat Sen ◽  
Chinmoy Pati ◽  
Samik Dutta ◽  
Ranjan Sen
Keyword(s):  
High Precision ◽  
Pid Control ◽  
Precision Positioning ◽  
Positioning Stage ◽  
Tuning Methods

A novel friction-actuated 2-DOF high precision positioning stage with hybrid decoupling structure

2022 ◽  
Vol 167 ◽  
pp. 104511
Author(s):  
Yanling Tian ◽  
Zhichen Huo ◽  
Fujun Wang ◽  
Cunman Liang ◽  
Beichao Shi ◽  
...  
Keyword(s):  
High Precision ◽  
Precision Positioning ◽  
Positioning Stage
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