A novel friction-actuated 2-DOF high precision positioning stage with hybrid decoupling structure
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2010 ◽
Vol 11
(5)
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pp. 681-687
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2013 ◽
Vol 1
(4)
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pp. 301
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2010 ◽
Vol 22
(5)
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pp. 421-433
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2009 ◽
Vol 52
(7)
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pp. 1858-1865
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