Study on the Pulse Phase Lag Effect on Two Mask Holes During Plasma Etching

Author(s):  
Peng Zhang
2020 ◽  
Vol 268 (12) ◽  
pp. 7897-7939 ◽  
Author(s):  
Chun-Hsiung Hsia ◽  
Chang-Yeol Jung ◽  
Bongsuk Kwon ◽  
Yoshihiro Ueda

2020 ◽  
Vol 231 (5) ◽  
pp. 1765-1781 ◽  
Author(s):  
Dinesh Kumar Sharma ◽  
Mitali Bachher ◽  
Santanu Manna ◽  
Nantu Sarkar

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