Investigation on Switching Structure Material Selection for RF-MEMS Shunt Capacitive Switches Using Ashby, TOPSIS and VIKOR

Transactions on Electrical and Electronic Materials ◽

10.1007/s42341-018-00094-3 ◽

2019 ◽

Vol 20 (3) ◽

pp. 181-188 ◽

Author(s):

Deepankar Deshmukh ◽

Mahesh Angira

Keyword(s):

Rf Mems ◽

Material Selection ◽

Capacitive Switches ◽

Switching Structure ◽

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Investigation on Dielectric Material Selection for RF-MEMS Shunt Capacitive Switches Using Ashby, TOPSIS and VIKOR

Transactions on Electrical and Electronic Materials ◽

10.1007/s42341-019-00162-2 ◽

2019 ◽

Vol 21 (2) ◽

pp. 157-164 ◽

Author(s):

Pritam Patra ◽

Mahesh Angira

Keyword(s):

Rf Mems ◽

Dielectric Material ◽

Material Selection ◽

Capacitive Switches ◽

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Charging Processes in Silicon Nitride Films for RF-MEMS Capacitive Switches: The Effect of Deposition Method and Film Thickness

10.1557/proc-1139-gg03-37 ◽

2008 ◽

Author(s):

George Papaioannou ◽

Usama Zaghloul ◽

Robert Plana ◽

Fabio Coccetti ◽

Patrick Pons ◽

...

Keyword(s):

Silicon Nitride ◽

Film Thickness ◽

Rf Mems ◽

Deposition Method ◽

Capacitive Switches ◽

Silicon Nitride Films

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Space product assurance. Material selection for controlling stress-corrosion cracking

10.3403/02527325 ◽

2002 ◽

Keyword(s):

Stress Corrosion ◽

Stress Corrosion Cracking ◽

Material Selection ◽

Corrosion Cracking ◽

Selection For ◽

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Space product assurance. Material selection for controlling stress-corrosion cracking

10.3403/30291511u ◽

2015 ◽

Keyword(s):

Stress Corrosion ◽

Stress Corrosion Cracking ◽

Material Selection ◽

Corrosion Cracking ◽

Selection For ◽

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Space product assurance. Material selection for controlling stress-corrosion cracking

10.3403/30291511 ◽

2014 ◽

Keyword(s):

Stress Corrosion ◽

Stress Corrosion Cracking ◽

Material Selection ◽

Corrosion Cracking ◽

Selection For ◽

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Dielectric Material Selection for High Capacitance Ratio and Low Loss in MEMS Capacitive Switch using Ashby’s Methodology

IOP Conference Series Materials Science and Engineering ◽

10.1088/1757-899x/1020/1/012029 ◽

2021 ◽

Vol 1020 ◽

pp. 012029

Author(s):

Kurmendra ◽

Rajesh Kumar

Keyword(s):

Dielectric Material ◽

Material Selection ◽

Low Loss ◽

Capacitive Switch ◽

High Capacitance ◽

Capacitance Ratio ◽

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Multi Criteria Material Selection for Eco-design

Computer-Aided Design and Applications ◽

10.1080/16864360.2015.1014730 ◽

2015 ◽

Vol 12 (5) ◽

pp. 526-536 ◽

Author(s):

Marco Serafini ◽

Davide Russo ◽

Caterina Rizzi

Keyword(s):

Material Selection ◽

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Alternative dielectric films for rf MEMS capacitive switches deposited using atomic layer deposited Al2O3/ZnO alloys

Sensors and Actuators A Physical ◽

10.1016/j.sna.2006.07.002 ◽

2007 ◽

Vol 135 (1) ◽

pp. 262-272 ◽

Author(s):

Cari F. Herrmann ◽

Frank W. DelRio ◽

David C. Miller ◽

Steven M. George ◽

Victor M. Bright ◽

...

Keyword(s):

Rf Mems ◽

Atomic Layer ◽

Dielectric Films ◽

Capacitive Switches

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Polyimide film based RF MEMS capacitive switches

2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278) ◽

10.1109/mwsym.2002.1011882 ◽

2003 ◽

Author(s):

R. Ramadoss ◽

S. Lee ◽

V.M. Bright ◽

Y.C. Lee ◽

K.C. Gupta

Keyword(s):

Rf Mems ◽

Polyimide Film ◽

Capacitive Switches

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RF MEMS capacitive switches fabricated with HDICP CVD SiN/sub x/

2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278) ◽

10.1109/mwsym.2002.1011600 ◽

2003 ◽

Author(s):

C.H. Chang ◽

J.Y. Qian ◽

B.A. Cetiner ◽

Q. Xu ◽

M. Bachman ◽

...

Keyword(s):

Rf Mems ◽

Capacitive Switches

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