capacitive switches
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A study of hopping transport during discharging in SiNx films for MEMS capacitive switches

2020 ◽  
Vol 114 ◽  
pp. 113878
Author(s):  
D. Birmpiliotis ◽  
M. Koutsoureli ◽  
G. Stavrinidis ◽  
G. Konstantinidis ◽  
G. Papaioannou
Keyword(s):  
Capacitive Switches ◽  
Hopping Transport

On the Discharge Transport Mechanisms Through the Dielectric Film in MEMS Capacitive Switches

2020 ◽  
Vol 29 (2) ◽  
pp. 202-213 ◽  
Author(s):  
Dimitris Birmpiliotis ◽  
George Stavrinidis ◽  
Matroni Koutsoureli ◽  
George Konstantinidis ◽  
George Papaioannou
Keyword(s):  
Dielectric Film ◽  
Transport Mechanisms ◽  
Capacitive Switches

Thermally activated discharging mechanisms in SiNx films with embedded CNTs for RF MEMS capacitive switches

2020 ◽  
Vol 223 ◽  
pp. 111230
Author(s):  
M. Koutsoureli ◽  
G. Stavrinidis ◽  
D. Birmpiliotis ◽  
G. Konstantinidis ◽  
G. Papaioannou
Keyword(s):  
Rf Mems ◽  
Capacitive Switches ◽  
Thermally Activated

Surface roughness effects on electromechanical performance of RF-MEMS capacitive switches

2020 ◽  
Vol 104 ◽  
pp. 113544 ◽  
Author(s):  
Hamid Nawaz ◽  
Muhammad Umar Masood ◽  
Muhammad Mubasher Saleem ◽  
Javaid Iqbal ◽  
Muhammad Zubair
Keyword(s):  
Surface Roughness ◽  
Rf Mems ◽  
Capacitive Switches ◽  
Roughness Effects ◽  
Electromechanical Performance

A comparative study of nanostructured Silicon-Nitride electrical properties for potential application in RF-MEMS capacitive switches

2019 ◽  
Vol 100-101 ◽  
pp. 113360 ◽  
Author(s):  
D. Birmpiliotis ◽  
G. Stavrinidis ◽  
M. Koutsoureli ◽  
G. Konstantinidis ◽  
G. Papaioannou ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Electrical Properties ◽  
Comparative Study ◽  
Potential Application ◽  
Rf Mems ◽  
Capacitive Switches ◽  
Nanostructured Silicon
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