Electric heating performance of carbon thin films prepared from SU-8 photoresist by deep UV exposure and carbonization
Keyword(s):
Deep Uv
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2018 ◽
Vol 456
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pp. 561-567
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Keyword(s):
1993 ◽
Vol 51
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pp. 1100-1101
Keyword(s):
2013 ◽
Vol 133
(5)
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pp. 293-299
2020 ◽
Vol 249
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pp. 119363
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2012 ◽
Vol 25
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pp. 8-12
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Keyword(s):
2014 ◽
Vol 258
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pp. 219-224
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