The achievement of very high pumping speeds in the ultra-high vacuum region

1961 ◽  
Vol 13 ◽  
pp. 317-320 ◽  
Author(s):  
D.R. Sweetman
Shinku ◽  
1964 ◽  
Vol 7 (12) ◽  
pp. 405-410
Author(s):  
Taichi NOMOTO ◽  
Hiroshi ISHII

1983 ◽  
Vol 23 ◽  
Author(s):  
Tomoyasu Inoue ◽  
Kenji Shibata ◽  
Koichi Kato ◽  
Toshio Yoshii ◽  
Iwao Higashinakagawa ◽  
...  

ABSTRACTRecent progress of SOI growth by electron beam recrystallization is described. Transient temperature profile on the recrystallizing sample surface was analyzed experimentally by direct observation with a thermovision, which is essential for the understanding of crystal growith mechanism. SOI growth was performed by a spot beam annealing and a pseudo-line shaped beam annealing. The line shaped electron beam has been proved to be useful for large area crystallization.Emphasis was placed on lateral seeded recrystallization of silicon layer evaporated in an ultra high vacuum. Silicon layers with the seed area grown epitaxially during the evaporation and above 1 μm thickness were successfully recrystallized, resulting in reproducible lateral epitaxiy. The pseudo-line shaped electron beam formed by very high frequency oscillation enabled dimensional enlargement of lateral epitaxial growth. crystalline properties were characterized by analyses of Rutherford backscattering and electron channeling pattern.


Author(s):  
George H. N. Riddle ◽  
Benjamin M. Siegel

A routine procedure for growing very thin graphite substrate films has been developed. The films are grown pyrolytically in an ultra-high vacuum chamber by exposing (111) epitaxial nickel films to carbon monoxide gas. The nickel serves as a catalyst for the disproportionation of CO through the reaction 2C0 → C + CO2. The nickel catalyst is prepared by evaporation onto artificial mica at 400°C and annealing for 1/2 hour at 600°C in vacuum. Exposure of the annealed nickel to 1 torr CO for 3 hours at 500°C results in the growth of very thin continuous graphite films. The graphite is stripped from its nickel substrate in acid and mounted on holey formvar support films for use as specimen substrates.The graphite films, self-supporting over formvar holes up to five microns in diameter, have been studied by bright and dark field electron microscopy, by electron diffraction, and have been shadowed to reveal their topography and thickness. The films consist of individual crystallites typically a micron across with their basal planes parallel to the surface but oriented in different, apparently random directions about the normal to the basal plane.


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