Improvements in the use of a field emission microscope to measure hydrogen pressures in the ultra high vacuum region

Vacuum ◽  
1976 ◽  
Vol 26 (4-5) ◽  
pp. 213
Author(s):  
Michel Troyonal ◽  
Huei Pei Kuoal ◽  
Benjamin M. Siegelal

A field emission system for our experimental ultra high vacuum electron microscope has been designed, constructed and tested. The electron optical system is based on the prototype whose performance has already been reported. A cross-sectional schematic illustrating the field emission source, preaccelerator lens and accelerator is given in Fig. 1. This field emission system is designed to be used with an electron microscope operated at 100-150kV in the conventional transmission mode. The electron optical system used to control the imaging of the field emission beam on the specimen consists of a weak condenser lens and the pre-field of a strong objective lens. The pre-accelerator lens is an einzel lens and is operated together with the accelerator in the constant angular magnification mode (CAM).


Author(s):  
Jian Zhang ◽  
Yangyang Zhao ◽  
Yongjun Cheng ◽  
Detian Li ◽  
Changkun Dong

1999 ◽  
Vol 5 (S2) ◽  
pp. 646-647
Author(s):  
H.W. Mook ◽  
A.H.V. van Veen ◽  
P. Kruit

The energy resolution which can be attained in electron energy loss spectroscopy (EELS) is determined by the energy spread of the electron source. The energy width of a high brightness electron gun (typically 0.4 to 0.8 eV) blurs the energy spectrum. A pre-specimen energy filter or monochromator must be used to reduce the energy width of the beam below 0.1 eV to allow detailed EELS analysis of the electronic band structures in materials. The monochromator can not only improve EELS, but it is also capable of improving the spatial resolution in low voltage SEM, which is limited by the chromatic blur of the objective lens. A new type of monochromator the Fringe Field Monochromator has been designed and experiments in an ultra high vacuum setup show the monochromatisation of a Schottky Field Emission Gun.


Shinku ◽  
1964 ◽  
Vol 7 (12) ◽  
pp. 405-410
Author(s):  
Taichi NOMOTO ◽  
Hiroshi ISHII

Author(s):  
A. Tonomura ◽  
T. Komoda

We have developed a field emission electron microscope. Although field emission gun requires ultra high vacuum and skillful technique, it brings about the favorable characteristics of high brightness and small energy spread. This characteristics will enable a significant progress in coherent electron optics and high resolution electron microscopy, especially in electron beam holography.Its column is Hitachi HU-11C Electron Microscope modified for ultra high vacuum operation, and it is evacuated with five ion pumps. Field emission gun is divided into two parts and is evacuated differentially with two ion pumps and a sublimation pump. The final pressures in these rooms are 5x10-10 Torr and 5x10-8 Torr respectively.


Author(s):  
C.J. Harland ◽  
J.H. Klein ◽  
P. Akhter ◽  
J.A. Venables

INTRODUCTION.The electron back-scattering pattern (EBSP) is a simple means of obtaining the crystallographic orientation of samples in the SEM. Kikuchi bands are observed on a fluorescent screen ∼15mm in front of a (tilted) sample /l/ and shadows, for example of three spherical balls, can be used to obtain orientation determinations accurate to ± 0. 5° /2/. We have also shown that a fibre-optic detector of angular diameter <2θB can be used to form images of polycrystalline material with markedly increased grain contrast /3/.In the present paper we report that these techniques have been transferred onto an ultra-high vacuum SEM equipped with a field emission gun (FEG). The higher brightness of the FEG enables the spot size to be reduced markedly. The transition between the orientation of one grain and the next has been shown to be as sharp as 50nm. Shifts due to sub-grain boundaries down to ∼1° can be readily seen


Author(s):  
P.E. Bovey ◽  
I.R.M. Wardell ◽  
P.M. Williams

The use of a high brightness field emission source holds clear promise in the area of micro Auger analysis of surfaces. The high current density and small probe diameter obtainable from the field emitter (30 n A into 300Ǻ, for example) offer the possibility of recording Auger spectra from areas less than 300Ǻ, as previously demonstrated . Furthermore, the ultra high vacuum technology necessary for a reliable field emission source, is wholly compatible with the type of vacuum experimental vessel customary in surface analysis applications.We describe here results obtained with an HB50A Auger Microprobe in which an environmental cell, introduced on a bellows movement into the experimental vessel, permits heating to 800°C in an atmosphere of 0.1 torr of gas. The sample under study was pure polycrystalline iron.This was reacted with methane at 750°C in situ for 12 hours. The carbon resulting from cracked methane, dissolved in the iron to such an extent that, on cooling to 600˚C, precipitation occured. Figure 1 shows an SEM image of a characteristic precipitate, recorded with the sample held at 600˚C at a magnification of 2,000 X.


Author(s):  
Dennis M. Maher ◽  
David C. Joy

Although the "cold" field emission gun has been used successfully for both transmission and scanning electron microscopy it requires ultra-high vacuum which is not obtained easily when such a gun is interfaced to a conventional microscope system. Recently, the "thermal" field emission gun (TFEG) in which the emitting tip is held at around 1700°K has been proposed as an alternative electron source for such applications. Under this condition the tip is cleaned continuously, and surface asperities are smoothed, therefore stable operation is possible in a high vacuum. In this paper we report on the build-up characteristics, current stability and brightness of a TFEG which has been interfaced to a JEOL JEM 100B microscope equipped with a scanning attachment. The gun consists of a (111) tungsten emitter set on a rhenium filament, three anodes and a two stage magnetic alignment system. The gun chamber is ion pumped to a pressure in the range 6xl0-8 to 2xl0-9 torr.


2000 ◽  
Vol 633 ◽  
Author(s):  
Koichi Hata ◽  
Akihiro Takakura ◽  
Yahachi Saito

AbstractField emission of electrons from multiwall carbon nanotubes (MWCNTs) has been investigated by field emission microscopy (FEM) in an ultra-high vacuum chamber. An MWCNT whose tip is capped by curved graphite layers gives a FEM pattern consisting of 6 bright pentagons when the surface of the nanotube tip is clean. Even in the ultra-high vacuum with a base pressure of about 10-10 Torr, residual gas molecules, attracted by polarization forces, adsorb on the nanotube tips. The adsorbed molecules reside preferentially on the pentagonal sites, giving bright spots in the FEM pattern. A flash heating the emitter at about 1300 K allows the molecules to desorb, and the nanotube emitter recovers the original clean surfaces. The adsorption and desorption of gas molecules are responsible for stepwise increases and decreases in the emission current, respectively.


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