TiN as a high temperature diffusion barrier for arsenic and boron
1986 ◽
Vol 4
(6)
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pp. 2537-2538
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1987 ◽
Vol 5
(5)
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pp. 2977-2977
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Keyword(s):
1994 ◽
Vol 30
(10)
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pp. 1263-1267
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2019 ◽
Vol 357
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pp. 384-392
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Keyword(s):
2016 ◽
Vol 2016
(4)
◽
pp. 36-44
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Keyword(s):
2010 ◽
Vol 20
(11)
◽
pp. 2134-2138
◽
2016 ◽
Vol 26
(8)
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pp. 2257-2262
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