Silane oxidation study: Analysis of data for SiO2 films deposited by low temperature chemical vapour deposition
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1996 ◽
Vol 166
(1-4)
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pp. 628-630
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2001 ◽
Vol 231
(1-2)
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pp. 242-247
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2010 ◽
Vol 43
(18)
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pp. 185102
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1992 ◽
pp. 204-210