Optical characterization of polycrystalline silicon before and after thermal oxidation

1985 ◽  
Vol 125 (3-4) ◽  
pp. 235-241 ◽  
Author(s):  
P. Montaudon ◽  
M.H. Debroux ◽  
F. Ferrieu ◽  
A. Vareille
Keyword(s):  
Thermal Oxidation ◽  
Polycrystalline Silicon ◽  
Optical Characterization ◽  
Before And After

Optical Characterization of Surface Profiles of Various Si1-xGex/Si Wafers Before and After Annealing Step

2019 ◽  
Vol 28 (1) ◽  
pp. 261-268
Author(s):  
Woo Sik Yoo ◽  
Takeshi Ueda ◽  
Toshikazu Ishigaki ◽  
Kitaek Kang
Keyword(s):  
Optical Characterization ◽  
Annealing Step ◽  
Before And After ◽  
Surface Profiles

Optical characterization of polycrystalline silicon thin films

1996 ◽  
Author(s):  
William A. McGahan ◽  
Blaine R. Spady ◽  
Blaine D. Johs ◽  
Olivier Laparra
Keyword(s):  
Thin Films ◽  
Polycrystalline Silicon ◽  
Optical Characterization ◽  
Silicon Thin Films

Optical characterization of amorphous and polycrystalline silicon films

1996 ◽  
Author(s):  
Effiong Ibok ◽  
Shyam Garg ◽  
George G. Li ◽  
A. Rahim Forouhi ◽  
Iris Bloomer ◽  
...  
Keyword(s):  
Polycrystalline Silicon ◽  
Optical Characterization ◽  
Silicon Films ◽  
Polycrystalline Silicon Films
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