725. Production of low energy hydrogen ion beams

Vacuum ◽  
1968 ◽  
Vol 18 (5) ◽  
pp. 302
Keyword(s):  
Ion Beams ◽  
Low Energy ◽  
Hydrogen Ion

Chemical Precursors for GaAs Etching with low Energy ion Beams: Chlorine adsorption on GaAs(100)

1991 ◽  
Vol 223 ◽  
Author(s):  
Richard B. Jackman ◽  
Glenn C. Tyrrell ◽  
Duncan Marshall ◽  
Catherine L. French ◽  
John S. Foord
Keyword(s):  
Ion Beam ◽  
Ion Beams ◽  
Low Energy ◽  
Ion Beam Etching ◽  
Chlorine Adsorption

ABSTRACTThis paper addresses the issue of chlorine adsorption on GaAs(100) with respect to the mechanisms of thermal and ion-enhanced etching. The use of halogenated precursors eg. dichloroethane is also discussed in regard to chemically assisted ion beam etching (CAIBE).

An automatic beam positioning system for low energy ion beams

1969 ◽  
Vol 72 (2) ◽  
pp. 217-219 ◽  
Author(s):  
R.B. Brown ◽  
P.D. Bourland ◽  
D. Powers
Keyword(s):  
Ion Beams ◽  
Low Energy ◽  
Positioning System

Surface morphology of low energy hydrogen ion eroded stainless steel

1979 ◽  
Vol 41 (3) ◽  
pp. 185-186 ◽  
Author(s):  
D. M. Mattox ◽  
D. J. Sharp
Keyword(s):  
Stainless Steel ◽  
Surface Morphology ◽  
Low Energy ◽  
Hydrogen Ion

Inhibited flammability and surface inactivation of wood irradiated by low energy hydrogen ion showers (LEHIS)

2007 ◽  
Vol 259 (2) ◽  
pp. 875-883 ◽  
Author(s):  
Gene Q. Blantocas ◽  
Philip Edward R. Mateum ◽  
Ross William M. Orille ◽  
Rafael Julius U. Ramos ◽  
Jonathan Lee C. Monasterial ◽  
...  
Keyword(s):  
Low Energy ◽  
Hydrogen Ion

Transport of intense ion beams and space charge compensation issues in low energy beam lines (invited)

2012 ◽  
Vol 83 (2) ◽  
pp. 02B320 ◽  
Author(s):  
N. Chauvin ◽  
O. Delferrière ◽  
R. Duperrier ◽  
R. Gobin ◽  
P. A. P. Nghiem ◽  
...  
Keyword(s):  
Space Charge ◽  
Charge Compensation ◽  
Ion Beams ◽  
Low Energy ◽  
Energy Beam
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