Influence of gas composition on the sputtering rate of cathode material in glow-discharge lamps

Vacuum ◽  
1972 ◽  
Vol 22 (3) ◽  
pp. 123
Keyword(s):  
Glow Discharge ◽  
Cathode Material ◽  
Gas Composition

Methods of Improving Glow-Discharge-Deposited a-Si1−xGex:H

1991 ◽  
Vol 219 ◽  
Author(s):  
Y. S. Tsuo ◽  
Y. Xu ◽  
E. A. Ramsay ◽  
R. S. Crandall ◽  
S. J. Salomon ◽  
...  
Keyword(s):  
Material Processing ◽  
Glow Discharge ◽  
Substrate Temperature ◽  
Gas Mixtures ◽  
Gas Composition ◽  
Processing Methods ◽  
Helium 4 ◽  
Process Gas

ABSTRACTWe have studied methods of improving glow-discharge-deposited a-Si1−x Gex :H alloys deposited using silane and germane gas mixtures. Material processing methods studied include (1) varying the substrate temperature from 170° to 280°C, (2) varying the process gas composition and pressure, (3) dilution of the feed gas by hydrogen, argon, or helium, (4) enhancing etching during deposition by adding small amounts of XeF2 vapor into the process gas, and (5) postdeposition annealing and/or hydrogenation.

A numerical simulation of rf glow discharge containing an electronegative gas composition

1990 ◽  
Vol 67 (7) ◽  
pp. 3264-3268 ◽  
Author(s):  
Yong‐Ho Oh ◽  
Nak‐Heon Choi ◽  
Duk‐In Choi
Keyword(s):  
Numerical Simulation ◽  
Glow Discharge ◽  
Gas Composition ◽  
Rf Glow Discharge

Impact of the cathode material on the analytical glow discharge

2010 ◽  
Author(s):  
E. Barisone ◽  
L. Therese ◽  
Th. Nelis ◽  
A. Zahri ◽  
Ph. Belenguer
Keyword(s):  
Glow Discharge ◽  
Cathode Material

Silicon and indium as secondary cathode for the analysis of solid alumina and sapphire direct-current glow discharge mass spectrometry

2022 ◽  
Author(s):  
Jochen Busam ◽  
Gagan Paudel ◽  
Marisa Di Sabatino
Keyword(s):  
Mass Spectrometry ◽  
Glow Discharge ◽  
Cathode Material ◽  
Direct Current ◽  
Glow Discharge Mass Spectrometry

We demonstrate and compare indium and silicon as secondary cathode material for the analysis of flat, solid alumina and sapphire matrices by direct-current glow discharge mass spectrometry (dc-GDMS). The mask...

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