Fabrication of AIN thin films by reactive ionized cluster beam deposition technique
Keyword(s):
1993 ◽
Vol 11
(5)
◽
pp. 1916
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Keyword(s):
1999 ◽
Vol 200
(3-4)
◽
pp. 441-445
◽
Keyword(s):
2017 ◽
Vol 8
(9)
◽
pp. 891-896
◽
Keyword(s):
1982 ◽
Vol 21
(Part 2, No. 9)
◽
pp. L551-L552
◽
1999 ◽
Vol 29
(2)
◽
pp. 388-392
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Keyword(s):