Electron energy distribution function in a dc magnetron sputtering discharge

Vacuum ◽  
1992 ◽  
Vol 43 (8) ◽  
pp. 837-842 ◽  
Author(s):  
I Ivanov ◽  
Sv Statev ◽  
V Orlinov ◽  
R Shkevov
Keyword(s):  
Distribution Function ◽  
Magnetron Sputtering ◽  
Energy Distribution ◽  
Electron Energy ◽  
Electron Energy Distribution Function ◽  
Energy Distribution Function ◽  
Electron Energy Distribution ◽  
Dc Magnetron Sputtering

Electron Energy Distribution Function Measured by Electrostatic Probes at Divertor Plasma in JFT-2M Tokamak

2003 ◽  
Vol 42 (Part 1, No. 2A) ◽  
pp. 657-662 ◽  
Author(s):  
Kazuya Uehara ◽  
Akira Tsushima ◽  
Hiroshi Amemiya ◽  
Hisato Kawasima ◽  
Katsumichi Hoshino
Keyword(s):  
Distribution Function ◽  
Energy Distribution ◽  
Electron Energy ◽  
Electron Energy Distribution Function ◽  
Energy Distribution Function ◽  
Electron Energy Distribution
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