Three-dimensional simulation of ion-enhanced dry-etch processes
1991 ◽
Vol 14
(3-4)
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pp. 269-281
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1991 ◽
Vol 13
(1-4)
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pp. 487-491
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2008 ◽
Vol 128
(2)
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pp. 459-466
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Keyword(s):
2015 ◽
Vol 9
(3)
◽
pp. 266
2009 ◽
Vol 19
(1)
◽
pp. 75-90
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1996 ◽
Vol 51
(2)
◽
pp. 245-260
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2020 ◽
Vol 9
(1)
◽
pp. 579-586
2017 ◽
Vol 65
(5)
◽
pp. 406-416
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Keyword(s):