Interface structure during ion-beam-induced epitaxial crystallization of silicon

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(93)90702-8 ◽

1993 ◽

Vol 80-81 ◽

pp. 881-885 ◽

Author(s):

J.S. Custer ◽

A. Battaglia ◽

M. Saggio ◽

F. Priolo

Keyword(s):

Ion Beam ◽

Interface Structure ◽

Epitaxial Crystallization

Download Full-text

MD simulations of ion beam induced epitaxial crystallization at a-Si/c-Si interfaces: interface structure and elementary processes of crystallization

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(98)00694-6 ◽

1999 ◽

Vol 148 (1-4) ◽

pp. 375-380 ◽

Author(s):

B Weber ◽

D.M Stock ◽

K Gärtner

Keyword(s):

Ion Beam ◽

Md Simulations ◽

Interface Structure ◽

Elementary Processes ◽

Epitaxial Crystallization

Download Full-text

Study of ion beam induced epitaxial crystallization of SrTiO3

Journal of Applied Physics ◽

10.1063/1.372365 ◽

2000 ◽

Vol 87 (7) ◽

pp. 3450-3456 ◽

Author(s):

K. Oyoshi ◽

S. Hishita ◽

H. Haneda

Keyword(s):

Ion Beam ◽

Epitaxial Crystallization

Download Full-text

Ion beam induced epitaxial crystallization of NiSi2

Applied Physics Letters ◽

10.1063/1.102989 ◽

1990 ◽

Vol 56 (21) ◽

pp. 2117-2119 ◽

Author(s):

M. C. Ridgway ◽

R. G. Elliman ◽

J. S. Williams

Keyword(s):

Ion Beam ◽

Epitaxial Crystallization

Download Full-text

Synthesis of Non-thermal-equilibrium Composition Semiconductor by Ion-beam-induced Epitaxial Crystallization.

Hyomen Kagaku ◽

10.1380/jsssj.18.803 ◽

1997 ◽

Vol 18 (12) ◽

pp. 803-809

Author(s):

Naoto KOBAYASHI

Keyword(s):

Thermal Equilibrium ◽

Ion Beam ◽

Equilibrium Composition ◽

Epitaxial Crystallization

Download Full-text

Strain and optical characteristics study of ferromagnetic GaMnAs fabricated by ion beam induced epitaxial crystallization

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2016.05.019 ◽

2016 ◽

Vol 306 ◽

pp. 92-96

Author(s):

Nai-Hui Chen ◽

Chien-Hsu Chen ◽

Chien-Ping Lee

Keyword(s):

Ion Beam ◽

Optical Characteristics ◽

Epitaxial Crystallization

Download Full-text

Interface Structure, Adhesion, and Ion Beam Processing

Materials and Processes for Surface and Interface Engineering ◽

10.1007/978-94-011-0077-9_4 ◽

1995 ◽

pp. 111-149 ◽

Author(s):

J. E. E. Baglin

Keyword(s):

Ion Beam ◽

Interface Structure

Download Full-text

Ion mass and energy dependence of ion-beam-induced epitaxial crystallization of SrTiO/sub 3/

1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) ◽

10.1109/iit.1998.813846 ◽

2002 ◽

Author(s):

K. Oyoshi ◽

S. Hishita ◽

S. Suehara ◽

M. Komatsu ◽

T. Suzuki ◽

...

Keyword(s):

Energy Dependence ◽

Ion Beam ◽

Epitaxial Crystallization

Download Full-text

Ferromagnetic GeMn thin film prepared by ion implantation and ion beam induced epitaxial crystallization annealing

Applied Physics Letters ◽

10.1063/1.4729752 ◽

2012 ◽

Vol 100 (24) ◽

pp. 242412 ◽

Author(s):

C. H. Chen ◽

H. Niu ◽

D. C. Yan ◽

H. H. Hsieh ◽

C. P. Lee ◽

...

Keyword(s):

Thin Film ◽

Ion Implantation ◽

Ion Beam ◽

Epitaxial Crystallization

Download Full-text

Dose rate dependence of the ion-beam-induced epitaxial crystallization in silicon

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(93)96176-d ◽

1993 ◽

Vol 80-81 ◽

pp. 538-542 ◽

Author(s):

V. Heera ◽

R. Kögler ◽

W. Skorupa ◽

R. Grötzschel

Keyword(s):

Dose Rate ◽

Ion Beam ◽

Rate Dependence ◽

Epitaxial Crystallization

Download Full-text

Activation energies for light ions in ion beam induced epitaxial crystallization

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(98)00770-8 ◽

1999 ◽

Vol 148 (1-4) ◽

pp. 370-374 ◽

Author(s):

A Kinomura ◽

A Chayahara ◽

N Tsubouchi ◽

Y Horino ◽

J.S Williams

Keyword(s):

Ion Beam ◽

Activation Energies ◽

Epitaxial Crystallization ◽

Download Full-text