Atypical characteristics of KrF excimer laser ablation of indium-tin oxide films

1995 ◽  
Vol 86 (1-4) ◽  
pp. 219-222 ◽  
Author(s):  
T. Szörényi ◽  
Z. Kántor ◽  
L.D. Laude
Keyword(s):  
Laser Ablation ◽  
Excimer Laser ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Excimer Laser Ablation ◽  
Krf Excimer Laser ◽  
Tin Oxide Films

Excimer laser processing of indium‐tin‐oxide films: An optical investigation

1995 ◽  
Vol 78 (10) ◽  
pp. 6211-6219 ◽  
Author(s):  
T. Szörényi ◽  
L.D. Laude ◽  
I. Bertóti ◽  
Z. Kántor ◽  
Zs. Geretovszky
Keyword(s):  
Excimer Laser ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Laser Processing ◽  
Oxide Films ◽  
Optical Investigation ◽  
Tin Oxide Films

Resistivity and oxygen content of indium tin oxide films deposited at room temperature by pulsed-laser ablation

1999 ◽  
Vol 86 (2) ◽  
pp. 991-994 ◽  
Author(s):  
Y. Wu ◽  
C. H. M. Marée ◽  
R. F. Haglund ◽  
J. D. Hamilton ◽  
M. A. Morales Paliza ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Oxygen Content ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Room Temperature ◽  
Oxide Films ◽  
Pulsed Laser ◽  
Pulsed Laser Ablation ◽  
Tin Oxide Films

Characterization of thin indium tin oxide films deposited by pulsed XeCl laser ablation

2001 ◽  
Vol 34 (17) ◽  
pp. 2606-2609 ◽  
Author(s):  
M Martino ◽  
A Luches ◽  
M Fernández ◽  
P Anobile ◽  
V Petruzzelli
Keyword(s):  
Laser Ablation ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Xecl Laser ◽  
Tin Oxide Films

Reactive pulsed laser ablation and deposition of thin indium tin oxide films for solid state compact sensors

1999 ◽  
Vol 138-139 ◽  
pp. 522-526 ◽  
Author(s):  
R. Teghil ◽  
V. Marotta ◽  
A.Giardini Guidoni ◽  
T.M. Di Palma ◽  
C. Flamini
Keyword(s):  
Laser Ablation ◽  
Solid State ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Pulsed Laser ◽  
Pulsed Laser Ablation ◽  
Tin Oxide Films

Low-fluence excimer laser irradiation-induced defect formation in indium-tin oxide films

1996 ◽  
Vol 96-98 ◽  
pp. 363-369 ◽  
Author(s):  
T. Szo¨re´nyi ◽  
L.D. Laude ◽  
I. Berto´ti ◽  
Zs. Geretovszky ◽  
Z. Ka´ntor
Keyword(s):  
Laser Irradiation ◽  
Excimer Laser ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Defect Formation ◽  
Oxide Films ◽  
Excimer Laser Irradiation ◽  
Tin Oxide Films
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