Capacitive silicon accelerometer with highly symmetrical design
1990 ◽
Vol 21
(1-3)
◽
pp. 312-315
◽
Keyword(s):
Keyword(s):
1995 ◽
Vol 66
(10)
◽
pp. 5070-5074
◽
2018 ◽
Vol 33
(01)
◽
pp. 053-061
◽
2021 ◽
Keyword(s):
Keyword(s):
2017 ◽
Vol 87
(14)
◽
pp. 2738-2759
Keyword(s):
1987 ◽
Vol 58
(7)
◽
pp. 1226-1230
◽