The present investigation deals with the propagation of Rayleigh type surface waves in an isotropic microstretch thermoelastic diffusion solid half space under a layer of inviscid liquid. The secular equation for surface waves in compact form is derived after developing the mathematical model. The dispersion curves giving the phase velocity and attenuation coefficients with wave number are plotted graphically to depict the effect of an imperfect boundary alongwith the relaxation times in a microstretch thermoelastic diffusion solid half space under a homogeneous inviscid liquid layer for thermally insulated, impermeable boundaries and isothermal, isoconcentrated boundaries, respectively. In addition, normal velocity component is also plotted in the liquid layer. Several cases of interest under different conditions are also deduced and discussed.