Dopant effect on in situ doped metal-induced lateral crystallization of amorphous silicon films

2005 ◽  
Vol 249 (1-4) ◽  
pp. 65-70 ◽  
Author(s):  
Jun-Dar Hwang ◽  
Jyh-Yeu Chang ◽  
Ching-Yuan Wu
Keyword(s):  
Amorphous Silicon ◽  
Silicon Films ◽  
Dopant Effect ◽  
Lateral Crystallization

Effects of oxygen on the growth of Ni induced lateral crystallization of amorphous silicon films

2003 ◽  
Vol 80 (3) ◽  
pp. 577-580 ◽  
Author(s):  
You-Da Lin ◽  
YewChung Sermon Wu ◽  
Chi-Wei Chao ◽  
Guo-Ren Hu
Keyword(s):  
Amorphous Silicon ◽  
Silicon Films ◽  
Lateral Crystallization

Diffusion of TEM grid material into amorphous silicon films

1990 ◽  
Vol 48 (4) ◽  
pp. 660-661
Author(s):  
S. Kritzinger ◽  
J.C. Lombaard ◽  
C.J. Bedeker
Keyword(s):  
Amorphous Silicon ◽  
Silicon Films ◽  
Silicide Formation ◽  
Release Agent ◽  
Formation Reaction ◽  
Glass Substrates ◽  
Nucleation Sites ◽  
Amorphous Si ◽  
Tem Grid

While investigating the silicide formation reaction between thin bilayers of amorphous Si (a-Si) and Cr, an unintended interaction occurred between the specimens and the supporting TEM grids. In an attempt to understand this phenomenon, the interaction between a single film of a-Si and TEM grids made of Cu, Ni, Au and Mo were investigated by in situannealing in a Siemens Elmiskop 101. The 60 nm films, prepared by e-beam evaporation of pure Si onto glass substrates, covered with an acetone-soluble release agent, were amorphous.In Fig. 1 the interaction between the a-Si film and a Cu TEM grid is shown. Areas I, II, III and IV in (a) show different stages of the interaction, area IV being closest to the Cu grid bar, and area I being pure a-Si. The reaction started at about 600°C by crystallisation of the a-Si film at different spots in contact with the grid bars, and fanned out from these nucleation sites (area II).

The Influence of Cu and Au on Field Aided Lateral Crystallization of Amorphous Silicon Films

2000 ◽  
Vol 39 (Part 1, No. 11) ◽  
pp. 6191-6195 ◽  
Author(s):  
Chan-Jae Lee ◽  
Jae-Bok Lee ◽  
Yong-Chae Chung ◽  
Duck-kyun Choi
Keyword(s):  
Amorphous Silicon ◽  
Silicon Films ◽  
Lateral Crystallization
Sign in / Sign up

Export Citation Format

Share Document