Determination of the thickness and density of the ion bombardment induced altered layer in SiC by means of reflection electron energy loss study
2005 ◽
Vol 252
(5)
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pp. 1785-1792
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1992 ◽
Vol 21
(2)
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pp. 166-170
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2010 ◽
pp. 57-110
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Keyword(s):
1992 ◽
Vol 27
(10)
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pp. 2731-2733
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Keyword(s):
Keyword(s):