Probing thin over layers with variable energy/cluster ion beams

2006 ◽  
Vol 252 (19) ◽  
pp. 6517-6520 ◽  
Author(s):  
A. Spool ◽  
R. White
Keyword(s):  
Ion Beams ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Energy Cluster ◽  
Variable Energy

scholarly journals Tuning the electronic properties of LaAlO3 / SrTiO3 interfaces by irradiating the LaAlO3 surface with low-energy cluster ion beams

2018 ◽  
Vol 97 (3) ◽  
Author(s):  
Karl Ridier ◽  
Damien Aureau ◽  
Bruno Bérini ◽  
Yves Dumont ◽  
Niels Keller ◽  
...  
Keyword(s):  
Electronic Properties ◽  
Ion Beams ◽  
Low Energy ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Energy Cluster

Cu pattern etching by oxygen gas cluster ion beams with acetic acid vapor

2014 ◽  
Author(s):  
N. Toyoda ◽  
M. Kojima ◽  
R. Hinoura ◽  
A. Yamaguchi ◽  
K. Hara ◽  
...  
Keyword(s):  
Acetic Acid ◽  
Ion Beams ◽  
Acid Vapor ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Oxygen Gas

Morphology dependence of surface smoothing of Ar gas cluster ion beams

2005 ◽  
pp. 241-244
Author(s):  
S. Houzumi ◽  
T. Mashita ◽  
N. Toyoda ◽  
K. Mochiji ◽  
T. Mitamura ◽  
...  
Keyword(s):  
Ion Beams ◽  
Surface Smoothing ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Ar Gas

Surface modifications by gas cluster ion beams

1996 ◽  
pp. 165-169
Author(s):  
I. Yamada ◽  
J. Matsuo ◽  
Z. Insepov ◽  
M. Akizuki
Keyword(s):  
Surface Modifications ◽  
Ion Beams ◽  
Cluster Ion Beams ◽  
Cluster Ion
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