Low temperature wafer bonding with gas cluster ion beams

2019 ◽  
Author(s):  
Noriaki Toyoda ◽  
Shota Ikeda
Keyword(s):  
Low Temperature ◽  
Wafer Bonding ◽  
Ion Beams ◽  
Cluster Ion Beams ◽  
Cluster Ion

Generation of O2 and metalorganic cluster ion beams and its application to low-temperature thin oxide film formation

1996 ◽  
Vol 217-218 ◽  
pp. 78-81 ◽  
Author(s):  
M. Akizuki ◽  
J. Matsuo ◽  
M. Harada ◽  
S. Ogasawara ◽  
A. Doi ◽  
...  
Keyword(s):  
Low Temperature ◽  
Oxide Film ◽  
Film Formation ◽  
Ion Beams ◽  
Thin Oxide Film ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Thin Oxide

A New Low-Temperature Oxidation Technique by Gas Cluster Ion Beams

1995 ◽  
Author(s):  
Makoto AKIZUKI ◽  
Jiro MATSUO ◽  
Satoru OGASAWARA ◽  
Mitsuaki HARADA ◽  
Atsumasa DOI ◽  
...  
Keyword(s):  
Low Temperature ◽  
Ion Beams ◽  
Low Temperature Oxidation ◽  
Temperature Oxidation ◽  
Cluster Ion Beams ◽  
Cluster Ion

Cu pattern etching by oxygen gas cluster ion beams with acetic acid vapor

2014 ◽  
Author(s):  
N. Toyoda ◽  
M. Kojima ◽  
R. Hinoura ◽  
A. Yamaguchi ◽  
K. Hara ◽  
...  
Keyword(s):  
Acetic Acid ◽  
Ion Beams ◽  
Acid Vapor ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Oxygen Gas

Morphology dependence of surface smoothing of Ar gas cluster ion beams

2005 ◽  
pp. 241-244
Author(s):  
S. Houzumi ◽  
T. Mashita ◽  
N. Toyoda ◽  
K. Mochiji ◽  
T. Mitamura ◽  
...  
Keyword(s):  
Ion Beams ◽  
Surface Smoothing ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Ar Gas

Surface modifications by gas cluster ion beams

1996 ◽  
pp. 165-169
Author(s):  
I. Yamada ◽  
J. Matsuo ◽  
Z. Insepov ◽  
M. Akizuki
Keyword(s):  
Surface Modifications ◽  
Ion Beams ◽  
Cluster Ion Beams ◽  
Cluster Ion
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