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9781479950188, 9781479950164
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Cu pattern etching by oxygen gas cluster ion beams with acetic acid vapor

2014 ◽  
Author(s):  
N. Toyoda ◽  
M. Kojima ◽  
R. Hinoura ◽  
A. Yamaguchi ◽  
K. Hara ◽  
...  
Keyword(s):  
Acetic Acid ◽  
Ion Beams ◽  
Acid Vapor ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Oxygen Gas

Atomic layer deposition of MnOx for Cu capping layer in Cu/low-k interconnects

2014 ◽  
Author(s):  
Hiroaki Kawasaki ◽  
Kenji Matsumoto ◽  
Hiroyuki Nagai ◽  
Yuuki Kikuchi ◽  
Peng Chang
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Capping Layer ◽  
Layer Deposition ◽  
Low K

Restoration and pore sealing of low-k films by UV-assisted processes

2014 ◽  
Author(s):  
Bo Xie ◽  
Kelvin Chan ◽  
David Cui ◽  
He Ren ◽  
Daemian Raj ◽  
...  
Keyword(s):  
Pore Sealing ◽  
Low K

Challenges to via middle TSV integration at sub-28nm nodes

2014 ◽  
Author(s):  
Himani Suhag Kamineni ◽  
Sukeshwar Kannan ◽  
Ramakanth Alapati ◽  
Sarasvathi Thangaraju ◽  
Daniel Smith ◽  
...  

Reliability of segmented edge seal ring for RF devices

2014 ◽  
Author(s):  
J.P. Gambino ◽  
R.S. Graf ◽  
J.C. Malinowski ◽  
A.R. Cote ◽  
W.H. Guthrie ◽  
...  
Keyword(s):  
Seal Ring ◽  
Rf Devices

Reliability analysis of bumping schemes under chip package interaction

2014 ◽  
Author(s):  
Sri Ramakanth Kappaganthu ◽  
Aditya Karmarkar ◽  
Xiaopeng Xu ◽  
Karim El Sayed ◽  
Ibrahim Avci ◽  
...  
Keyword(s):  
Reliability Analysis

Novel stress-free Keep Out Zone process development for via middle TSV in 20nm planar CMOS technology

2014 ◽  
Author(s):  
Mohamed A. Rabie ◽  
Premachandran C. S. ◽  
Rakesh Ranjan ◽  
Mahadevan Iyer Natarajan ◽  
Sing Fui Yap ◽  
...  
Keyword(s):  
Process Development ◽  
Cmos Technology

ESD characterization and design guidelines for interconnects in 28nm CMOS

2014 ◽  
Author(s):  
Zongyu Dong ◽  
Fei Lu ◽  
Li Wang ◽  
Rui Ma ◽  
Chen Zhang ◽  
...  
Keyword(s):  
Design Guidelines
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