Effect of substrate temperature on the structural, optical and electrical properties of dc magnetron sputtered tantalum oxide films
2008 ◽
Vol 254
(7)
◽
pp. 1953-1960
◽
1981 ◽
Vol 28
(1)
◽
pp. 22-27
◽
Keyword(s):
2012 ◽
Vol 209
(11)
◽
pp. 2229-2234
◽
2009 ◽
Vol 255
(20)
◽
pp. 8334-8342
◽
2012 ◽
Vol 24
(3)
◽
pp. 884-888
Keyword(s):
2005 ◽
Vol 23
(3)
◽
pp. 512-519
◽
2018 ◽
Vol 47
(11)
◽
pp. 6681-6690
◽
2010 ◽
Vol 57
(2)
◽
pp. 260-263
◽
Keyword(s):