scholarly journals Functionalization of hydrogen-free diamond-like carbon films using open-air dielectric barrier discharge atmospheric plasma treatments

2008 ◽  
Vol 254 (17) ◽  
pp. 5323-5328 ◽  
Author(s):  
J.L. Endrino ◽  
J.F. Marco ◽  
M. Allen ◽  
P. Poolcharuansin ◽  
A.R. Phani ◽  
...  
Keyword(s):  
Dielectric Barrier Discharge ◽  
Barrier Discharge ◽  
Carbon Films ◽  
Atmospheric Plasma ◽  
Diamond Like Carbon ◽  
Dielectric Barrier ◽  
Plasma Treatments

Diamond-like Carbon Films Deposited in the Plasma of Dielectric Barrier Discharge at Atmospheric Pressure

2000 ◽  
Vol 39 (Part 1, No. 6A) ◽  
pp. 3359-3360 ◽  
Author(s):  
Dongping Liu ◽  
Shiji Yu ◽  
Tengcai Ma ◽  
Zhimin Song ◽  
Xuefeng Yang
Keyword(s):  
Dielectric Barrier Discharge ◽  
Atmospheric Pressure ◽  
Barrier Discharge ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Dielectric Barrier

Dielectric-barrier discharge plasma source and its application to synthesis of diamond like carbon films

2008 ◽  
Vol 1083 ◽  
Author(s):  
Xinpeng Wang ◽  
Xiaoliang Tang ◽  
Peter Xianping Feng
Keyword(s):  
Thin Films ◽  
Dielectric Barrier Discharge ◽  
Discharge Plasma ◽  
Barrier Discharge ◽  
Carbon Film ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Dielectric Barrier Discharge Plasma ◽  
Dielectric Barrier ◽  
Barrier Discharge Plasma

ABSTRACTDielectric barrier discharge plasma sources have been studied and used for syntheses of diamond like carbon thin films. The plasma electrical properties under different gases concentrations and pressures were diagnosed. Based on the results of characterizations, dielectric barrier discharge plasma at different methane-hydrogen-argon gas ratios was used to synthesize large area of diamond like carbon films. Experimental data indicate that only at argon concentration equal to or less than 75% diamond like carbon film fabrication could be accomplished, which has been confirmed based on the Raman spectra and their hardness measurements, whereas high argon content during deposition would result in graphite type of thin films.

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