Nanostructured thin films obtained by ultra-short pulse laser deposition of vanadium carbide

2009 ◽  
Vol 255 (10) ◽  
pp. 5220-5223 ◽  
Author(s):  
R. Teghil ◽  
A. De Bonis ◽  
A. Galasso ◽  
P. Villani ◽  
A. Santagata ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulse Laser Deposition ◽  
Pulse Laser ◽  
Vanadium Carbide ◽  
Short Pulse ◽  
Laser Deposition ◽  
Nanostructured Thin Films ◽  
Short Pulse Laser ◽  
Ultra Short Pulse ◽  
Ultra Short Pulse Laser

Chromium carbide thin films deposited by ultra-short pulse laser deposition

2009 ◽  
Vol 255 (17) ◽  
pp. 7729-7733 ◽  
Author(s):  
R. Teghil ◽  
A. Santagata ◽  
A. De Bonis ◽  
A. Galasso ◽  
P. Villani
Keyword(s):  
Thin Films ◽  
Pulse Laser Deposition ◽  
Pulse Laser ◽  
Chromium Carbide ◽  
Short Pulse ◽  
Laser Deposition ◽  
Short Pulse Laser ◽  
Ultra Short Pulse ◽  
Ultra Short Pulse Laser

Short-pulse laser deposition of diamond-like carbon thin films

1999 ◽  
Vol 69 (7) ◽  
pp. S347-S353 ◽  
Author(s):  
P.S. Banks ◽  
L. Dinh ◽  
B.C. Stuart ◽  
M.D. Feit ◽  
A.M. Komashko ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulse Laser Deposition ◽  
Pulse Laser ◽  
Short Pulse ◽  
Laser Deposition ◽  
Diamond Like Carbon ◽  
Short Pulse Laser ◽  
Carbon Thin Films

Ultra-short pulse laser ablation of Al70Cu20Fe10 alloy: Nanoparticles generation and thin films deposition

2009 ◽  
Vol 517 (6) ◽  
pp. 1880-1886 ◽  
Author(s):  
R. Teghil ◽  
L. D'Alessio ◽  
A. De Bonis ◽  
D. Ferro ◽  
A. Galasso ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Pulse Laser ◽  
Pulse Laser Ablation ◽  
Short Pulse ◽  
Alloy Nanoparticles ◽  
Short Pulse Laser ◽  
Ultra Short Pulse ◽  
Ultra Short Pulse Laser

Silicon Thinning using Ultra-Short Pulse Laser Ablation

2004 ◽  
Author(s):  
F. Beaudoin ◽  
P. Perdu ◽  
C. DeNardi ◽  
R. Desplats ◽  
J. Lopez ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Sample Preparation ◽  
Pulse Laser ◽  
Pulse Laser Ablation ◽  
Short Pulse ◽  
Special Care ◽  
Short Pulse Laser ◽  
Ultra Short Pulse ◽  
Ultra Short Pulse Laser

Abstract Ultra-short pulse laser ablation is applied to IC backside sample preparation. It is contact-less, non-thermal, precise and can ablate the various types of material present in IC packages. This study concerns the optimization of ultra-short pulse laser ablation for silicon thinning. Uncontrolled silicon roughness and poor uniformity of the laser thinned cavity needed to be tackled. Special care is taken to minimize the silicon RMS roughness to less than 1µm. Application to sample preparation of 256Mbit devices is presented.

The study of time dependent, broadband X-ray emission from ultra-short pulse laser produced plasmas

1994 ◽  
Author(s):  
Ronnie Shepherd ◽  
Rex Booth ◽  
Dwight Price ◽  
Rosemary Walling ◽  
Richard More ◽  
...  
Keyword(s):  
Pulse Laser ◽  
Short Pulse ◽  
Time Dependent ◽  
X Ray ◽  
Short Pulse Laser ◽  
Ultra Short Pulse ◽  
Ultra Short Pulse Laser

Ultra-short pulse laser safety - a challenge to materials science

2005 ◽  
Author(s):  
Andreas Hertwig ◽  
Sven Martin ◽  
Wolfgang Kautek ◽  
Jörg Krüger
Keyword(s):  
Pulse Laser ◽  
Materials Science ◽  
Short Pulse ◽  
Laser Safety ◽  
Short Pulse Laser ◽  
Ultra Short Pulse ◽  
Ultra Short Pulse Laser
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