Fabrication of micro-pin array with high aspect ratio on stainless steel using nanosecond laser beam machining

2013 ◽  
Vol 264 ◽  
pp. 653-663 ◽  
Author(s):  
Se Won Lee ◽  
Hong Shik Shin ◽  
Chong Nam Chu
Keyword(s):  
Stainless Steel ◽  
Aspect Ratio ◽  
Laser Beam ◽  
High Aspect Ratio ◽  
Nanosecond Laser ◽  
Laser Beam Machining

Micro extrusion of high aspect ratio bi-lumen tubes using 17-4PH stainless steel feedstock

2020 ◽  
Vol 58 ◽  
pp. 443-457
Author(s):  
Sandeep Kuriakose ◽  
Paolo Parenti ◽  
Massimiliano Annoni
Keyword(s):  
Stainless Steel ◽  
Aspect Ratio ◽  
High Aspect Ratio

Direct laser beam interference patterning technique for fast high aspect ratio surface structuring

2015 ◽  
Author(s):  
Simonas Indrisiunas ◽  
Bogdan Voisiat ◽  
Airidas Žukauskas ◽  
Gediminas Račiukaitis
Keyword(s):  
Aspect Ratio ◽  
Laser Beam ◽  
High Aspect Ratio ◽  
Surface Structuring ◽  
Direct Laser ◽  
Patterning Technique

scholarly journals Uniform Fabrication of Moems Arrays Using Dry Thick Resist Films

Proceedings ◽  
2017 ◽  
Vol 1 (4) ◽  
pp. 551
Author(s):  
Thierry Camps ◽  
Sami Abada ◽  
Benjamin Reig ◽  
Jean-Baptiste Doucet ◽  
Rémi Courson ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Laser Beam ◽  
Thermal Behavior ◽  
High Aspect Ratio ◽  
Microfluidic Channel ◽  
Uv Exposure ◽  
Microlens Arrays ◽  
Sensing Applications ◽  
Printing Technique

This study aims at focusing a laser beam at the center of a microfluidic channel for optical bio-sensing applications thanks to the collective integration of tunable microlens arrays on VCSELs devices. High aspect-ratio polymer-based MOEMS are successfully fabricated on small-sized samples using thick dry photoresist films. Such dry films are easier to use and less expensive than standard thick SU-8 and can be efficiently stacked on fragile GaAs samples using a soft-thermal-printing technique. By combining double UV exposure and planar metallization, uniform fabrication of MOEMS arrays is enabled and fabricated devices exhibit reproducible electro-thermal behavior.

The Accuracy of Micro-molds Produced by a UV Laser Induced Polymerization

1994 ◽  
Vol 116 (3) ◽  
pp. 370-376 ◽  
Author(s):  
K. Yamaguchi ◽  
T. Nakamoto ◽  
P. A. Abbay ◽  
S. Mibu
Keyword(s):  
Thin Films ◽  
Aspect Ratio ◽  
Laser Beam ◽  
High Aspect Ratio ◽  
Research Work ◽  
Practical Method ◽  
High Accuracy ◽  
Uv Laser ◽  
Ultraviolet Laser ◽  
Absorption Of Light

This research work deals with the development of a simple and practical method for manufacturing metallic micromachine parts on the order of 0.01–1.0 mm in size. In this method, an ultraviolet laser beam is irradiated onto the surface of a liquid photopolymer material through a mask. The irradiated pattern is then developed to produce a solidified photopolymer mold. Finally, the metallic part is made by an electroforming process. This paper deals with the first process, the making of the photopolymer mold. At first, the accuracy of the mold is estimated by applying the theories of diffraction and absorption of light. Next, the accuracy is examined experimentally. The results show an accuracy of ± 1 μm can be obtained when a proximity transfer of 10 μm between the mask and the photopolymer surface is used. By stacking thin films, thick and high aspect ratio molds with a reasonably high accuracy are made.

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