scholarly journals Uniform Fabrication of Moems Arrays Using Dry Thick Resist Films

Proceedings ◽  
2017 ◽  
Vol 1 (4) ◽  
pp. 551
Author(s):  
Thierry Camps ◽  
Sami Abada ◽  
Benjamin Reig ◽  
Jean-Baptiste Doucet ◽  
Rémi Courson ◽  
...  

This study aims at focusing a laser beam at the center of a microfluidic channel for optical bio-sensing applications thanks to the collective integration of tunable microlens arrays on VCSELs devices. High aspect-ratio polymer-based MOEMS are successfully fabricated on small-sized samples using thick dry photoresist films. Such dry films are easier to use and less expensive than standard thick SU-8 and can be efficiently stacked on fragile GaAs samples using a soft-thermal-printing technique. By combining double UV exposure and planar metallization, uniform fabrication of MOEMS arrays is enabled and fabricated devices exhibit reproducible electro-thermal behavior.

2011 ◽  
Vol 25 ◽  
pp. 1669-1672 ◽  
Author(s):  
Umesh Singh ◽  
Hyun Ae Lee ◽  
Young-Chul Byun ◽  
Amit Kumar ◽  
Sudipta Seal ◽  
...  

2005 ◽  
Vol 872 ◽  
Author(s):  
J. R. Huang ◽  
B. Bai ◽  
J. Shaw ◽  
T. N. Jackson ◽  
C. Y. Wei ◽  
...  

AbstractThis paper presents a novel method to create and integrate micro-machined devices and high aspect-ratio (height-to-width ratio) microstructures in which the microstructures are built up using multiple layers of photopolymer film and/or viscous solution. Very high aspect-ratio 2-and 3-dimensional (2-D and 3-D) microstructures were constructed by stacking photo-imageable polymer films. Such films may be dry films applied by lamination or solution layers applied by bar coating, or doctor blade coating. Photolithography is used in both cases to define the microstructure. This additive process of thin-film micromachining facilitates high aspect-ratio microstructure fabrication. We have demonstrated structures of up to 12-layers comprising 2-D arrays of deep trenches (180 μm deep and 25 μm wide) and a 2-layer SU-8 micro-trench array with an aspect ratio up to 36 on glass substrates. Miniaturized structures of interconnected reservoirs as small as 50 μm × 50 μm × 15 μm (∼38 pico liter storage capacity) are also being fabricated, along with a novel 5-layer microfluidic channel array and a vacuum-infiltration process for fluid manipulation. This method has the potential to create functional large-area micro-devices at low-cost and with increased device flexibility, durability, prototyping speed, and reduced process complexity for applications in optoelectronics, integrated detectors, and bio-devices. The novel multi-layer photopolymer dry film and solution process also allows microstructures in micro-electro-mechanical systems (MEMS) to be built with ease and provides the functionality of MEMS integration with electronic devices and integrated circuits (ICs).


2015 ◽  
Author(s):  
Simonas Indrisiunas ◽  
Bogdan Voisiat ◽  
Airidas Žukauskas ◽  
Gediminas Račiukaitis

2004 ◽  
Vol 101 (1-2) ◽  
pp. 175-182 ◽  
Author(s):  
Mary B. Chan-Park ◽  
Jun Zhang ◽  
Yehai Yan ◽  
C.Y. Yue

1994 ◽  
Vol 116 (3) ◽  
pp. 370-376 ◽  
Author(s):  
K. Yamaguchi ◽  
T. Nakamoto ◽  
P. A. Abbay ◽  
S. Mibu

This research work deals with the development of a simple and practical method for manufacturing metallic micromachine parts on the order of 0.01–1.0 mm in size. In this method, an ultraviolet laser beam is irradiated onto the surface of a liquid photopolymer material through a mask. The irradiated pattern is then developed to produce a solidified photopolymer mold. Finally, the metallic part is made by an electroforming process. This paper deals with the first process, the making of the photopolymer mold. At first, the accuracy of the mold is estimated by applying the theories of diffraction and absorption of light. Next, the accuracy is examined experimentally. The results show an accuracy of ± 1 μm can be obtained when a proximity transfer of 10 μm between the mask and the photopolymer surface is used. By stacking thin films, thick and high aspect ratio molds with a reasonably high accuracy are made.


Chemosensors ◽  
2018 ◽  
Vol 6 (4) ◽  
pp. 62 ◽  
Author(s):  
Luca Camilli ◽  
Maurizio Passacantando

Carbon nanotubes have been attracting considerable interest among material scientists, physicists, chemists, and engineers for almost 30 years. Owing to their high aspect ratio, coupled with remarkable mechanical, electronic, and thermal properties, carbon nanotubes have found application in diverse fields. In this review, we will cover the work on carbon nanotubes used for sensing applications. In particular, we will see examples where carbon nanotubes act as main players in devices sensing biomolecules, gas, light or pressure changes. Furthermore, we will discuss how to improve the performance of carbon nanotube-based sensors after proper modification.


Langmuir ◽  
2005 ◽  
Vol 21 (26) ◽  
pp. 12060-12063 ◽  
Author(s):  
François Bessueille ◽  
Mateu Pla-Roca ◽  
Christopher A. Mills ◽  
Elena Martinez ◽  
Josep Samitier ◽  
...  

2009 ◽  
Vol 1240 ◽  
Author(s):  
Miguel A. Saez ◽  
Lauren Montemayor ◽  
Priam Vasudevan Pillai ◽  
Ian W Hunter

AbstractElectroactive conducting polymers are currently studied for use in smart textiles that incorporate sensing, actuation, control, and data transmission. The development of intelligent garments that integrate these various functionalities over wide areas (i.e. the human body) requires the production of long, highly conductive, and mechanically robust fibers. This study focuses on the electrical, mechanical and electrochemical characterization of high aspect ratio polypyrrole fibers produced using a novel, custom-built fiber slicing instrument. In order to ensure high conductivity and mechanical robustness, the fibers are sliced from tetra-ethylammonium hexafluorophosphate-doped polypyrrole thin films electrodeposited onto a glassy carbon crucible. The computer-controlled, four-axis slicing instrument precisely cuts the film into thin, long fibers by running a sharp blade over the crucible in a continuous helical pattern. This versatile fabrication process has been used to produce free-standing fibers with square cross-sections of 2 μm × 3 μm, 20 μm × 20 μm, and 100 μm × 20 μm with lengths of 15 mm, 460 mm, and 1,200 mm, respectively. An electrochemical dynamic mechanical analyzer built in-house for nano- and microfiber testing was used to perform stress-strain and conductivity measurements in air. The fibers were found to, on average, have an elastic modulus of 1.7 GPa, yield strength of 37 MPa, ultimate tensile strength of 80 MPa, elongation at break of 49%, and an electrical conductivity of 12,700 S/m. SEM micrographs show that the fibers are free of defects and have cleanly cut edges. Preliminary measurements of the fibers’ strain-resistance relationship have resulted in gage factors suitable for strain sensing applications. Initial tests of the actuation performance of fibers in neat 1-butyl-3-methylimidazolium hexaflourophosphate have shown promising results. These monofilament fibers may be spun into yarns or braided into 2- and 3-dimensional structures for use as actuators, sensors, antennae, and electrical interconnects in smart fabrics.


Author(s):  
Luca Camilli ◽  
Maurizio Passacantando

Carbon nanotubes have been attracting considerable interest among material scientists, physicists, chemists and engineers for almost 30 years. Owing to their high aspect ratio, coupled with remarkable mechanical, electronic and thermal properties, carbon nanotubes have found application in diverse fields. In this review, we will cover the work on carbon nanotubes used for sensing applications. In particular, we will see examples where carbon nanotubes act as main players in devices sensing biomolecules, gas, light or pressure changes. Furthermore, we will discuss how to improve the performance of carbon nanotube-based sensors after proper modification.


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