In-situ fabrication and characterization of ordered Ge QDs in Si3N4 matrix without barrier layers by rf-magnetron sputtering

2014 ◽  
Vol 290 ◽  
pp. 167-171 ◽  
Author(s):  
Sammy Lee ◽  
Shujuan Huang ◽  
Gavin Conibeer ◽  
Martin Green
Keyword(s):  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Barrier Layers ◽  
In Situ Fabrication ◽  
Fabrication And Characterization ◽  
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Vol 320 (23) ◽  
pp. 3303-3306 ◽  
Author(s):  
Yaping Zhang ◽  
Liqing Pan ◽  
Hao Zhu ◽  
Hongmei Qiu ◽  
Jinghua Yin ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Cu2o Thin Films ◽  
Fabrication And Characterization ◽  
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2017 ◽  
Vol 43 (7) ◽  
pp. 5607-5615 ◽  
Author(s):  
Ling Li ◽  
Hongwei Qiao ◽  
Qinggang Li ◽  
Jie Zhang ◽  
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Keyword(s):  
In Situ Fabrication ◽  
Fabrication And Characterization ◽  
Filter Papers ◽  
Zirconia Powders

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2016 ◽  
Vol 600 ◽  
pp. 83-89 ◽  
Author(s):  
Sung-Ik Park ◽  
Seong-Il Kim ◽  
Soo Kyung Chang ◽  
Young-Hwan Kim
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Fabrication And Characterization
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