A surface-micromachining-based inertial micro-switch with compliant cantilever beam as movable electrode for enduring high shock and prolonging contact time
2016 ◽
Vol 387
◽
pp. 569-580
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Keyword(s):
Polysilicon cantilever beam using surface micromachining technology for application in microswitches
1997 ◽
Vol 7
(3)
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pp. 159-161
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2014 ◽
Vol 24
(6)
◽
pp. 065020
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2014 ◽
Vol 38
(1)
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pp. 15-29
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1993 ◽
Vol 3
(4)
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pp. 190-192
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Keyword(s):
1998 ◽
Vol 37
(02)
◽
pp. 171-178
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2009 ◽
Vol 4
(4)
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pp. 54-56
Keyword(s):