Chemical state analysis of heavily phosphorus-doped epitaxial silicon films grown on Si (1 0 0) by X-ray photoelectron spectroscopy

2018 ◽  
Vol 443 ◽  
pp. 131-137 ◽  
Author(s):  
Minhyeong Lee ◽  
Sungtae Kim ◽  
Dae-Hong Ko
1980 ◽  
Vol 19 (7) ◽  
pp. L349-L352 ◽  
Author(s):  
Naoto Koshizaki ◽  
Masahiro Kudo ◽  
Masanori Owari ◽  
Yoshimasa Nihei ◽  
Hitoshi Kamada

2011 ◽  
Vol 9 ◽  
pp. 54-57 ◽  
Author(s):  
Jin-Young Son ◽  
Masatake Machida ◽  
Hiroshi Oji ◽  
Yoshio Watanabe ◽  
Takehiro Maruyama ◽  
...  

2014 ◽  
Vol 320 ◽  
pp. 177-182 ◽  
Author(s):  
Kenichi Ozawa ◽  
Takashi Kakubo ◽  
Katsunori Shimizu ◽  
Naoya Amino ◽  
Kazuhiko Mase ◽  
...  

2007 ◽  
Vol 13 (S02) ◽  
Author(s):  
T Ogiwara ◽  
T Kimura ◽  
S Fukushima ◽  
K Tsukamoto ◽  
T Tazawa ◽  
...  

1975 ◽  
Vol 4 (3) ◽  
pp. 117-118 ◽  
Author(s):  
Y. Gohshi ◽  
T. Nakamura ◽  
M. Yoshimura

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