Low Temperature Growth of Beryllium Oxide Thin Films Prepared via Plasma Enhanced Atomic Layer Deposition
2020 ◽
Vol 38
(2)
◽
pp. 022404
◽
Keyword(s):
Keyword(s):
2008 ◽
Vol 53
(9(5))
◽
pp. 2880-2883
◽
Keyword(s):
2016 ◽
Vol 34
(4)
◽
pp. 041511
◽
Keyword(s):
Keyword(s):
2007 ◽
Vol 50
(6)
◽
pp. 1716
◽
Keyword(s):
2018 ◽
Vol 459
◽
pp. 830-834
◽
Keyword(s):