Enhanced Straylight Suppression of Short Carbon Nanotubes by using Platinum Silicide Catalyst Enhancer in Rapid Thermal Chemical Vapor Deposition Process

2021 ◽  
pp. 152250
Author(s):  
H.M. Iftekhar Jaim ◽  
John G. Hagopian
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Deposition Process ◽  
Chemical Vapor Deposition Process ◽  
Thermal Chemical Vapor Deposition ◽  
Platinum Silicide ◽  
Short Carbon ◽  
Vapor Deposition Process

Detection of Intermediates in Thermal Chemical Vapor Deposition Process Using Tetraethoxysilane

1994 ◽  
Vol 33 (Part 1, No. 6A) ◽  
pp. 3339-3342 ◽  
Author(s):  
Tetsuya Satake ◽  
Tetsuji Sorita ◽  
Hirofumi Fujioka ◽  
Hiroshi Adachi ◽  
Hiroyuki Nakajima
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Deposition Process ◽  
Chemical Vapor Deposition Process ◽  
Thermal Chemical Vapor Deposition ◽  
Vapor Deposition Process
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