Analysis of laser micromachining in silica glass with an absorbent slurry

CIRP Annals ◽

10.1016/j.cirp.2008.03.006 ◽

2008 ◽

Vol 57 (1) ◽

pp. 217-222 ◽

Author(s):

M. Mitsuishi ◽

N. Sugita ◽

I. Kono ◽

S. Warisawa

Keyword(s):

Silica Glass ◽

Laser Micromachining

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ABH damping of monolithic silica glass cantilever by structural and material modification using fs laser micromachining

International Journal of Applied Glass Science ◽

10.1111/ijag.15857 ◽

2020 ◽

Vol 12 (1) ◽

pp. 36-45

Author(s):

Kana Tomita ◽

Tetsuo Kishi ◽

Tetsuji Yano ◽

Pieter Vlugter ◽

Yves Bellouard

Keyword(s):

Silica Glass ◽

Laser Micromachining ◽

Monolithic Silica ◽

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Ablation Process of Silica Glass Induced by Laser Plasma Soft X-ray Irradiation

IEEJ Transactions on Electronics Information and Systems ◽

10.1541/ieejeiss.129.595 ◽

2009 ◽

Vol 129 (4) ◽

pp. 595-600

Author(s):

Tetsuya Makimura ◽

Takashige Fujimori ◽

Shuichi Torii ◽

Hiroyuki Niino ◽

Kouichi Murakami

Keyword(s):

Laser Plasma ◽

Silica Glass ◽

Ablation Process ◽

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Fabrication of Plastic Micro Tip Array using Laser Micromachining of Nanoparticles Dispersed Polymer and Micromolding

IEEJ Transactions on Sensors and Micromachines ◽

10.1541/ieejsmas.126.7 ◽

2006 ◽

Vol 126 (1) ◽

pp. 7-13 ◽

Author(s):

Hiromasa Yagyu ◽

Shigehiko Hayashi ◽

Osamu Tabata

Keyword(s):

Laser Micromachining

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A user-friendly simulation tool to facilitate writing of complex part programs for laser micromachining

Pacific International Conference on Applications of Lasers and Optics ◽

10.2351/1.5056970 ◽

2006 ◽

Author(s):

R. G. Hume ◽

J. P. Hayes ◽

P. G. Iovenitti

Keyword(s):

Laser Micromachining ◽

Simulation Tool ◽

Complex Part ◽

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A system for the removal of debris produced during laser micromachining

International Congress on Applications of Lasers & Electro-Optics ◽

10.2351/1.5060934 ◽

2006 ◽

Author(s):

C. F. Dowding ◽

J. Lawrence

Keyword(s):

Laser Micromachining

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High power dpss laser micromachining of silicon, tungsten and stainless steel for device singulation

International Congress on Applications of Lasers & Electro-Optics ◽

10.2351/1.5060530 ◽

2005 ◽

Author(s):

Dimitris Karnakis ◽

Graham Rutterford ◽

Martyn Knowles

Keyword(s):

Stainless Steel ◽

Laser Micromachining ◽

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Laser micromachining and energy field manufacturing

International Congress on Applications of Lasers & Electro-Optics ◽

10.2351/1.5061150 ◽

2007 ◽

Author(s):

Wenwu Zhang ◽

Jeffrey Shaw ◽

Andrew Trimmer ◽

Z. Jay Cao ◽

Magdi Azer

Keyword(s):

Laser Micromachining ◽

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Improved surface quality of rotation symmetric structures by excimer laser micromachining

10.2351/1.5059603 ◽

1997 ◽

Author(s):

H. K. Tönshoff ◽

C. Graumann ◽

M. Rinke ◽

P. Lonergan ◽

J. Wais

Keyword(s):

Surface Quality ◽

Excimer Laser ◽

Laser Micromachining ◽

Rotation Symmetric ◽

Symmetric Structures

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UV laser micromachining for the electronics industry

10.2351/1.5061348 ◽

2008 ◽

Author(s):

Jae-Hoon Lee ◽

Hyonkee Sohn ◽

Dong-Sig Shin ◽

Ji-Whan Noh ◽

Nam-Sung Kim ◽

...

Keyword(s):

Laser Micromachining ◽

Electronics Industry ◽

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High quality laser micromachining of silicon: A crystallographic comparison of process results achieved with state-of-the-art tripled Nd:YAG and IR lasers

International Congress on Applications of Lasers & Electro-Optics ◽

10.2351/1.5061114 ◽

2007 ◽

Author(s):

Claudio Ferrari ◽

Lucia Nasi ◽

Werner Wiechmann ◽

Sergio Pellegrino

Keyword(s):

State Of The Art ◽

Laser Micromachining ◽

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