High quality laser micromachining of silicon: A crystallographic comparison of process results achieved with state-of-the-art tripled Nd:YAG and IR lasers
Keyword(s):
2015 ◽
Vol 821-823
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pp. 528-532
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Keyword(s):
Keyword(s):
2004 ◽
Vol 359
(1444)
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pp. 689-698
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