Deposition of carbon films onto metal and silicon substrates by filtered cathodic vacuum arc, plasma enhanced CVD and unbalanced magnetron sputtering

2004 ◽  
Vol 13 (4-8) ◽  
pp. 1346-1349 ◽  
Author(s):  
I. Ahmad ◽  
P.D. Maguire ◽  
P. Lemoine ◽  
S.S. Roy ◽  
J.A. McLaughlin
Keyword(s):  
Magnetron Sputtering ◽  
Carbon Films ◽  
Vacuum Arc ◽  
Silicon Substrates ◽  
Arc Plasma ◽  
Plasma Enhanced Cvd ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Filtered Cathodic Vacuum Arc

scholarly journals Investigation of diamond-like-carbon films prepared by unbalanced magnetron sputtering

2005 ◽  
Vol 54 (10) ◽  
pp. 4944
Author(s):  
Yang Wu-Bao ◽  
Fan Song-Hua ◽  
Zhang Gu-Ling ◽  
Ma Pei-Ning ◽  
Zhang Shou-Zhong ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron
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