Effects of hydrogen additive on microwave plasma CVD of nanocrystalline diamond in mixtures of argon and methane

2004 ◽  
Vol 13 (4-8) ◽  
pp. 671-678 ◽  
Author(s):  
Y. Liu ◽  
C. Liu ◽  
Y. Chen ◽  
Y. Tzeng ◽  
P. Tso ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Nanocrystalline Diamond ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd ◽  
Hydrogen Additive

scholarly journals Structural Transformation upon Nitrogen Doping of Ultrananocrystalline Diamond Films by Microwave Plasma CVD

2009 ◽  
Vol 2009 ◽  
pp. 1-7 ◽  
Author(s):  
Chien-Chung Teng ◽  
Shin-Min Song ◽  
Chien-Min Sung ◽  
Chhiu-Tsu Lin
Keyword(s):  
Surface Morphology ◽  
Structural Changes ◽  
Microwave Plasma ◽  
Nanocrystalline Diamond ◽  
Spectroscopic Techniques ◽  
Plasma Cvd ◽  
Xps Spectra ◽  
Spatially Resolved ◽  
Ultrananocrystalline Diamond ◽  
Microwave Plasma Cvd

The molecular properties and surface morphology of undoped and N-doped ultra-nanocrystalline diamond (UNCD) films deposited by microwave plasma CVD with addition of nitrogen are investigated with various spectroscopic techniques. The results of spatially resolved Raman scattering, ATR/FT-IR and XPS spectra show more amorphous andsp2/sp3ratio characteristics in N-doped UNCD films. The surface morphology in AFM scans shows larger nanocrystalline diamond clusters in N-doped UNCD films. Incorporation of nitrogen into UNCD films has promoted an increase of amorphoussp2-bonded carbons in the grain boundaries and the size of nanocrystalline diamond grains that are well correlated to the reported enhancement of conductivity and structural changes of UNCD films.

scholarly journals Deposition of Nanocrystalline Diamond Films on Pure Ti by CH4/H2 Microwave Plasma CVD

2005 ◽  
Vol 54 (1) ◽  
pp. 73-78
Author(s):  
Cheolmun YIM ◽  
Dohoon SHIN ◽  
Yusuke HAYASHI ◽  
Keishi IRIE ◽  
Ri-ichi MURAKAMI ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Diamond Films ◽  
Nanocrystalline Diamond ◽  
Plasma Cvd ◽  
Nanocrystalline Diamond Films ◽  
Microwave Plasma Cvd

Formation of diamond and nanocrystalline diamond films by microwave plasma CVD

2002 ◽  
Vol 407 (1-2) ◽  
pp. 18-25 ◽  
Author(s):  
Mineo Hiramatsu ◽  
Chi Hian Lau ◽  
Andrew Bennett ◽  
John S. Foord
Keyword(s):  
Microwave Plasma ◽  
Diamond Films ◽  
Nanocrystalline Diamond ◽  
Plasma Cvd ◽  
Nanocrystalline Diamond Films ◽  
Microwave Plasma Cvd

Growth of nanocrystalline diamond films deposited by microwave plasma CVD system at low substrate temperatures

2006 ◽  
Vol 203 (12) ◽  
pp. 3011-3015 ◽  
Author(s):  
S. Potocky ◽  
A. Kromka ◽  
J. Potmesil ◽  
Z. Remes ◽  
Z. Polackova ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Diamond Films ◽  
Nanocrystalline Diamond ◽  
Plasma Cvd ◽  
Nanocrystalline Diamond Films ◽  
Microwave Plasma Cvd ◽  
Substrate Temperatures

Research of microstructural characteristics on nanocrystalline diamond by microwave plasma CVD

2011 ◽  
Vol 257 (13) ◽  
pp. 5508-5512 ◽  
Author(s):  
Jing-Ming Hung ◽  
Li-Hsiang Lin ◽  
Yung-Hsun Shih ◽  
Chung-Ming Liu ◽  
Hsin-Chung Cheng ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Nanocrystalline Diamond ◽  
Plasma Cvd ◽  
Microstructural Characteristics ◽  
Microwave Plasma Cvd
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