Characteristics of carbon-related materials deposited in electron-energy controlled CH4/H2 RF discharge plasmas

2011 ◽  
Vol 20 (4) ◽  
pp. 568-572 ◽  
Author(s):  
Junichi Emi ◽  
Satoru Iizuka
2007 ◽  
Vol 90 (20) ◽  
pp. 201501 ◽  
Author(s):  
K. Baba ◽  
T. Kaneko ◽  
R. Hatakeyama

1972 ◽  
Vol 43 (10) ◽  
pp. 1475-1480 ◽  
Author(s):  
D. D. Neiswender ◽  
F. C. Kohout

1996 ◽  
Vol 36 (2) ◽  
pp. 133-145 ◽  
Author(s):  
V.V Chechkin ◽  
I.P Fomin ◽  
L.I Grigor`eva ◽  
A.P Litvinov ◽  
N.I Nazarov ◽  
...  

2010 ◽  
Vol 50 (6-7) ◽  
pp. 520-528 ◽  
Author(s):  
I.M. Pankratov ◽  
A.A. Beletskii ◽  
V.L. Berezhnyj ◽  
P.Ya. Burchenko ◽  
V.V. Chechkin ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document