Three-dimensional finite element simulation of Love mode surface acoustic wave in layered structures including ZnO piezoelectric film and diamond substrate

2018 ◽  
Vol 88 ◽  
pp. 123-128 ◽  
Author(s):  
Jin Qian ◽  
Cuiping Li ◽  
Lirong Qian ◽  
Mingji Li ◽  
Hongji Li ◽  
...  
Keyword(s):  
Finite Element ◽  
Acoustic Wave ◽  
Finite Element Simulation ◽  
Surface Acoustic Wave ◽  
Three Dimensional ◽  
Piezoelectric Film ◽  
Element Simulation ◽  
Diamond Substrate ◽  
Dimensional Finite Element ◽  
Three Dimensional Finite Element
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