Development of in situ scanning electron microscope system for real time observation of metal deposition from ionic liquid

2008 ◽  
Vol 10 (12) ◽  
pp. 1901-1904 ◽  
Author(s):  
Satoshi Arimoto ◽  
Hitoshi Kageyama ◽  
Tsukasa Torimoto ◽  
Susumu Kuwabata
Keyword(s):  
Ionic Liquid ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Real Time ◽  
Metal Deposition ◽  
Time Observation ◽  
Real Time Observation ◽  
Scanning Electron

Real-time Observation of Aluminum Chemical Vapor Deposition in an Environmental Scanning Electron Microscope

1998 ◽  
Vol 4 (5) ◽  
pp. 497-503 ◽  
Author(s):  
David L. Linam ◽  
Jeff Drucker
Keyword(s):  
Chemical Vapor Deposition ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Real Time ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Environmental Scanning Electron Microscope ◽  
Environmental Scanning ◽  
Time Observation ◽  
Scanning Electron

A technique has been developed to provide real-time imaging, with several nanometer resolution, of organometallic chemical vapor deposition (CVD) by scanning electron microscopy under conditions approaching those used in the microelectronics industry. The technique involves modifications to an environmental scanning electron microscope (ESEM) to facilitate organometallic precursor gas handling and sample heating. To demonstrate the usefulness of this technique for studying the microstructural evolution of CVD-grown metal films, results of Al/SiO2 CVD experiments are presented.

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