Deposition of highly transparent and conductive Ga-doped zinc oxide films on tilted substrates by atmospheric pressure plasma jet

2019 ◽  
Vol 802 ◽  
pp. 458-466 ◽  
Author(s):  
Wen-Kai Chen ◽  
Jing-Chi Huang ◽  
Yu-Chen Chen ◽  
Ming-Tsang Lee ◽  
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Sung-Hung Huang ◽  
Chin-Jyi Wu ◽  
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Author(s):  
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Yao-Jhen Yang ◽  
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