Improvement in thermal stability and crystallization mechanism of Sm doped GeSbTe thin films for phase change memory applications

2021 ◽  
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Vineet Sharma
RSC Advances ◽  
2017 ◽  
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pp. 56000-56005 ◽  
Author(s):  
Hua Zou ◽  
Liangjun Zhai ◽  
Yifeng Hu ◽  
Xiaoqin Zhu ◽  
Haipeng You ◽  
...  

Thermal stability of phase change films is key for phase change memory applications. Sm doped Sn15Sb85 thin films were prepared by magnetron sputtering. Compared with none doped films, the thermal stability of the film was significantly improved.


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