multilayer thin films
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2022 ◽  
Vol 12 (1) ◽  
Author(s):  
Dongju Kim ◽  
Kang Min Kim ◽  
Hyuksu Han ◽  
Junho Lee ◽  
Deahyeon Ko ◽  
...  

AbstractThin film-based optical sensors have been attracting increasing interest for use in developing technologies such as biometrics. Multilayered dielectric thin films with different refractive indices have been utilized to modulate the optical properties in specific wavelength bands for spectral selectivity of Thin Film Narrow Bandpass Filters (TFNBFs). Progress in TFNBF design has been made with the incorporation of metallic thin films. Narrower bandwidths with higher transmittance have been achieved in specific spectral bands. In this work, Ti/TiO2/SiO2 based multilayer thin films were prepared using pulsed-DC reactive sputtering. Computer simulations using the Essential Macleod Program allowed the optimal number of layers and thickness of the multilayer thin films to be determined to efficiently tailor the optical path transmitting specific wavelength bands. The addition of Ti metal layers within dielectric (TiO2/SiO2) multilayer thin films significantly changes the cutoff frequency of transmittance at specific wavelengths. Representative 26 multilayer films consisting of Ti, TiO2, and SiO2 show lower transmittance of 10.29% at 400 nm and 10.48% at 680 nm. High transmittance of 80.42% at 485 nm was observed, which is expected to improve the spectral selectivity of the TFNBF. This work provides a contribution to future simulation based design strategy based on experimental thin film engineering for potential industrial development opportunities such as optical biometrics.


2021 ◽  
pp. 2100330
Author(s):  
Suman Pahal ◽  
Rakshith Boranna ◽  
Gurusiddappa R. Prashanth ◽  
Manoj M. Varma

2021 ◽  
Vol 127 (11) ◽  
Author(s):  
L. A. Martínez-Chávez ◽  
K. Esquivel ◽  
D. A. Solis-Casados ◽  
R. Velázquez-Castillo ◽  
E. Haro-Poniatowski ◽  
...  

2021 ◽  
Author(s):  
Sungwook Mhin ◽  
Junho Lee ◽  
Deahyeon Ko ◽  
Kyoung Ryeol Park ◽  
Dongwon Kim ◽  
...  

Abstract Thin film-based optical sensors have been attracting increasing interest for use in developing technologies such as biometrics. Multilayered dielectric thin films with different refractive indices have been utilized to modulate the optical properties in specific wavelength bands for spectral selectivity of Thin Film Narrow Bandpass Filters (TFNBFs). Progress in TFNBF design has been made with the incorporation of metallic thin films. Narrower bandwidths with higher transmittance have been achieved in specific spectral bands. In this work, Ti/TiO2/SiO2 based multilayer thin films were prepared using pulsed-DC reactive sputtering. Computer simulations using the Essential Macleod Program allowed the optimal number of layers and thickness of the multilayer thin films to be determined to efficiently tailor the optical path transmitting specific wavelength bands. The addition of Ti metal layers within dielectric (TiO2/SiO2) multilayer thin films significantly changes the cutoff frequency of transmittance at specific wavelengths. Representative 26 multilayer films consisting of Ti, TiO2, and SiO2 show lower transmittance of 10.29 % at 400 nm and 10.48 % at 680 nm. High transmittance of 80.42 % at 485 nm was observed, which is expected to improve the spectral selectivity of the TFNBF. This work provides a contribution to future simulation based design strategy based on experimental thin film engineering for potential industrial development opportunities such as optical biometrics.


2021 ◽  
Vol 8 ◽  
Author(s):  
Jinyu Ruan ◽  
Chao Yin ◽  
Tiandong Zhang ◽  
Hao Pan

Ferroelectric multilayer films attract great attention for a wide variation of applications. The synergistic effect by combining different functional layers induces distinctive electrical properties. In this study, ferroelectric BaZr0.2Ti0.8O3/PbZr0.52Ti0.48O3/BaZr0.2Ti0.8O3 (BZT/PZT/BZT) multilayer thin films are designed and fabricated by using the magnetron sputtering method, and a LaNiO3 (LNO) seed layer is introduced. The microstructures and electrical properties of the BZT/PZT/BZT films with and without the LNO seed layer are systematically studied. The results show that the BZT/PZT/BZT/LNO thin film exhibits much lower surface roughness and a preferred (100)-orientation growth, with the growth template and tensile stress provided by the LNO layer. Moreover, an enhanced dielectric constant, decreased dielectric loss, and improved ferroelectric properties are achieved in BZT/PZT/BZT/LNO thin films. This work reveals that the seed layer can play an important role in improving the microstructure and properties of ferroelectric multilayer films.


2021 ◽  
pp. 2150030
Author(s):  
Hanting Dong ◽  
Liang Ke ◽  
Xiangjun Hui ◽  
Jiangfeng Mao ◽  
Haiqing Du ◽  
...  

Effects of thermal misfit strains on dielectric features for sandwich structural barium strontium titanate (BST) thin films on metal plates were investigated via a modified thermodynamic model. When TEC of substrates is closer to that of BST, larger permittivity and tunability can be received. The tendency of permittivities and tunabilities of such films as a function of TEC of substrates agrees with that of single compositional BST films and compositionally graded BST multilayer films. The highest tunability reaches 60% at the biasing field of 300 kV/cm when the films are onto Ti metal. Moreover, Ba[Formula: see text]Sr[Formula: see text]TiO3/Ba[Formula: see text]Sr[Formula: see text]TiO3/Ba[Formula: see text]Sr[Formula: see text]TiO3 structure can obtain higher tunability than Ba[Formula: see text]Sr[Formula: see text]TiO3/Ba[Formula: see text]Sr[Formula: see text]TiO3/Ba[Formula: see text]Sr[Formula: see text]TiO3 structure, while Ba[Formula: see text]Sr[Formula: see text]TiO3/Ba[Formula: see text]Sr[Formula: see text]TiO3/Ba[Formula: see text]Sr[Formula: see text]TiO3 films show better compatible composition range for relatively larger tunability. Dielectric properties of sandwich-like BST films in some references can also be analyzed based on our calculated results.


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