Plasma nitridation and microstructure of high-k ZrO2 thin films fabricated by cathodic arc deposition
2005 ◽
Vol 277
(1-4)
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pp. 422-427
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Keyword(s):
High K
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2009 ◽
Vol 61
(8)
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pp. 789-792
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2003 ◽
Vol 254-256
◽
pp. 463-466
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Keyword(s):
2010 ◽
Vol 204
(24)
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pp. 3941-3946
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Keyword(s):
2008 ◽
Vol 20
(17)
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pp. 175216
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2013 ◽
Vol 265
◽
pp. 738-744
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Keyword(s):